Zhang Ping, Yan Zhiruo, Zhang Chen
Appl Opt. 2021 Dec 10;60(35):10849-10854. doi: 10.1364/AO.441079.
We propose a dual-polarization microring resonator that can simultaneously measure refractive index and pressure. Since the transverse electric (TE) mode and the transverse magnetic (TM) mode of a silicon waveguide have different energy distributions, TE and TM polarization have significant differences in sensitivity to environmental refractive index and pressure changes. Different responses to external refractive index and pressure changes can be obtained by simultaneously exciting TE and TM modes in a microring resonator. The refractive index sensitivities obtained in the experiment were 132.97 and 40.54 nm/RIU; the pressure sensitivities were 1.41 and 1.59 pm/KPa, respectively. By inversion of the second-order sensitivity matrix, it is verified that the effective refractive index and pressure response can be obtained simultaneously through a single measurement to realize the dual-parameter sensing of the surrounding refractive index and the pressure of the device structure.
我们提出了一种能够同时测量折射率和压力的双偏振微环谐振器。由于硅波导的横向电（TE）模式和横向磁（TM）模式具有不同的能量分布，TE和TM偏振在对环境折射率和压力变化的灵敏度方面存在显著差异。通过在微环谐振器中同时激发TE和TM模式，可以获得对外部折射率和压力变化的不同响应。实验中获得的折射率灵敏度分别为132.97和40.54 nm/RIU；压力灵敏度分别为1.41和1.59 pm/KPa。通过对二阶灵敏度矩阵求逆，验证了通过单次测量可以同时获得有效折射率和压力响应，以实现对周围折射率和器件结构压力的双参数传感。
