Yin Shaojie, Wang Xiaoyan, Wang Zhibin, Xiao Sanshui, Guan Xiaowei
School of Electrical Engineering, Yanshan University, Qinhuangdao 066004, China.
Institute for Future, Qingdao University, Qingdao 266071, China.
Sensors (Basel). 2020 Oct 16;20(20):5870. doi: 10.3390/s20205870.
A silicon photonic polarization multiplexing (PM) sensor featuring both a large range and a high resolution is proposed and experimentally demonstrated. The sensor includes a Fabry-Pérot (FP) resonator and a microring resonator (MRR) functioning as the sensing parts. With PM technology, the FP resonator only works on the transverse-electric mode while the MRR only on the transverse-magnetic mode. Thus, the proposed sensor can simultaneously achieve a large range with a short FP resonator and a high resolution with a high-Q MRR. Measured results show a range of 113 °C and a resolution of 0.06 °C for temperature sensing, and a range of 0.58 RIU (refractive index unit) with the resolution of 0.002 RIU for analyte refractive index sensing.
提出并通过实验证明了一种兼具大范围和高分辨率的硅光子偏振复用（PM）传感器。该传感器包括一个法布里-珀罗（FP）谐振器和一个用作传感部件的微环谐振器（MRR）。采用PM技术时，FP谐振器仅在横向电模式下工作，而MRR仅在横向磁模式下工作。因此，所提出的传感器可以通过短FP谐振器同时实现大范围，通过高Q值的MRR实现高分辨率。测量结果表明，温度传感的范围为113℃，分辨率为0.06℃；分析物折射率传感的范围为0.58 RIU（折射率单位），分辨率为0.002 RIU。
