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用于三维微变形场测量的三波长同步电子散斑干涉术

Tri-wavelength simultaneous ESPI for 3D micro-deformation field measurement.

作者信息

Jiang Hanyang, Yang Fujun, Dai Xiangjun, He Xiaoyuan, Peng Guangjian

出版信息

Appl Opt. 2022 Jan 10;61(2):615-622. doi: 10.1364/AO.445824.

DOI:10.1364/AO.445824
PMID:35200904
Abstract

Electronic speckle pattern interferometry (ESPI), a well-established technique for micro-deformation measurement, can be used to determine both in-plane and out-of-plane displacement components. Although many works in ESPI have been reported for three-dimensional (3D) displacement measurement, few works have focused on the simultaneous measurement of 3D deformation fields. Here we present an ESPI system that consists of three sub-interferometers for simultaneous measurement of all three displacement components and in-plane strain fields. A 3CCD color camera, a specially designed shifting stage, and three lasers with optimal wavelengths are used in this system. The lasers and 3CCD camera provide independent interferograms with different color signals, while the shifting stage allows the sub-interferometers to achieve simultaneous phase shifting. The results of color separation and experimental measurement demonstrate the utility of the system.

摘要

电子散斑干涉术(ESPI)是一种成熟的微变形测量技术,可用于确定面内和面外位移分量。尽管已有许多关于ESPI用于三维(3D)位移测量的报道,但很少有工作专注于同时测量3D变形场。在此,我们提出一种ESPI系统,它由三个子干涉仪组成,用于同时测量所有三个位移分量和面内应变场。该系统使用了一台3CCD彩色相机、一个专门设计的移动平台以及三个具有最佳波长的激光器。激光器和3CCD相机提供具有不同颜色信号的独立干涉图,而移动平台使子干涉仪能够实现同步相移。颜色分离和实验测量结果证明了该系统的实用性。

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