Coarse-to-fine optical MEMS accelerometer design and simulation.

A coarse-to-fine optical microelectromechanical systems (MEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the proof mass due to the applied acceleration is detected using two FP cavities that comprise the system's optical system. Using coarse-to-fine measurement and the dual wavelength method simultaneously increases the sensitivity of the accelerometer as well as the linear measurement range. The optical simulation shows that the sensitivity of the proposed device is 10 times as high as that of a similar optical MEMS accelerometer with one FP cavity. In addition, the proposed optical system is insensitive to the displacements of the proof mass in the orthogonal directions, which considerably reduced the cross-axis sensitivity. The minimum feature size of the structure is 15 µm and the optical signal is conducted completely through the optical fibers, facilitating the device fabrication. Here are the results of the simulation: mechanical sensitivity of 190 nm/g, optical sensitivity of 8 nm/g, linear measurement of ±5, and first resonance frequency of 1141 Hz.