Taghavi Majid, Abedi Abolfazl, Parsanasab Gholam-Mohammad, Rahimi Mojtaba, Noori Mohammad, Nourolahi Hamzeh, Latifi Hamid
Opt Express. 2022 Jun 6;30(12):20159-20174. doi: 10.1364/OE.455772.
In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the cross-section of a proof mass (PM) which is suspended by four U-shaped springs. The applied acceleration tends to move the PM in the opposite direction. The arrays of fixed and movable comb fingers produce an electrostatic force which keeps the PM in its resting position. The voltage that can provide this electrostatic force is considered as the output of the sensor. Using a closed-loop detection method it is possible to increase the measurement range without losing the resolution. The proposed sensor is fabricated on a silicon-on-insulator wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of ±5 g. In the closed-loop mode, the sensitivity and bias instability of the sensor are 1.16 V/g and 40 µg, respectively.
本文提出了一种基于法布里-珀罗（FP）干涉仪的闭环微机电光系统（MOEMS）加速度计。FP腔在劈开的单模光纤末端与由四个U形弹簧悬挂的质量块（PM）的横截面之间形成。施加的加速度倾向于使质量块向相反方向移动。固定梳齿和活动梳齿阵列产生静电力，使质量块保持在其静止位置。能够提供这种静电力的电压被视为传感器的输出。使用闭环检测方法可以在不损失分辨率的情况下增加测量范围。所提出的传感器采用体微机械加工方法在绝缘体上硅晶圆上制造。传感器特性表征结果表明，该加速度计在±5 g范围内具有线性响应。在闭环模式下，传感器的灵敏度和偏置不稳定性分别为1.16 V/g和40 µg。
