Feng Yu, Yang Wuhao, Zou Xudong
Key Laboratory of Low Altitude Monitoring Network Technology, QiLu Aerospace Information Research Institute, Jinan 250101, China.
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Micromachines (Basel). 2022 Dec 23;14(1):39. doi: 10.3390/mi14010039.
In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by integrating coupled ring resonators with a suspended directional coupler on a proof mass. With the help of FEA simulation and numerical analysis, the proposed optical mode-localized sensor presents a sensitivity of 10/g (modal power ratio/acceleration) and an inertial displacement of from -8 to 10 microns corresponding to a range from -23.5 to 29.4 g. The free spectral range is 4.05 nm around 1.55 microns. The acceleration resolution limited by thermomechanical noise is 4.874 μg. The comprehensive performance of this design is competitive with existing MEMS mode localized accelerometers. It demonstrates the potential of the optical mode-localized inertial sensors as candidates for state-of-the-art sensors in the future.
在本文中，我们展示了一种基于光学模式局域化传感机制的新型光子集成加速度计，该加速度计是在器件层厚度为220 nm的SOI晶圆上设计的。通过将耦合环形谐振器与悬浮定向耦合器集成在一个检测质量块上，可以实现高灵敏度和大测量范围。借助有限元分析（FEA）模拟和数值分析，所提出的光学模式局域化传感器的灵敏度为10/g（模式功率比/加速度），对应于-23.5至29.4 g的范围，其惯性位移为-8至10微米。在1.55微米附近的自由光谱范围为4.05 nm。由热机械噪声限制的加速度分辨率为4.874 μg。该设计的综合性能与现有的MEMS模式局域化加速度计具有竞争力。它展示了光学模式局域化惯性传感器作为未来先进传感器候选者的潜力。
