High-Q and tunable analog of electromagnetically induced transparency in terahertz all-dielectric metamaterial.

We propose a novel all-dielectric metamaterial (ADMM), to the best of our knowledge, with a simple structure to achieve the analog of electromagnetically induced transparency (EIT) in the terahertz range. The ADMM is constructed by unit cells with two same silicon bar resonators on a quartz substrate. By breaking the symmetrical array of silicon resonators, the guided-mode resonance can be excited in the substrate, and the destructive interference between a broadband electric-dipole resonance and a narrowband guided-mode resonance gives rise to an EIT-like response. The EIT window can reach a high quality factor (Q-factor) over 1500 by carefully adjusting the asymmetry degree within the unit cell. A dynamically tunable ADMM was further developed by employing photoactive doped silicon. By varying the carrier density of the doped silicon through optical pump, the strength of the EIT-like resonance can be actively modulated, enabling an on-to-off switch of the slow-light effect. The designed ADMM can achieve a high-Q EIT-like response and dynamic modulation, which may give potential applications in bio/chemical sensing, optical switching, and slow-light devices.