Nie Tongyu, Han Zhe, Gou Zixing, Wang Chao, Tian Huiping
Appl Opt. 2022 Feb 20;61(6):1552-1558. doi: 10.1364/AO.452140.
We propose a sensor with high anti-interference ability using a photonic crystal cavity coupled system for simultaneous sensing of the refractive index (RI) and temperature (T) based on an electromagnetically induced transparency-like effect. A transparent window is achieved in the transmission spectrum through destructive interference between the air mode resonance and dielectric mode resonance in two one-dimensional photonic crystal structures. The T-sensitive material (SU-8) is used in the coupled system, promoting sensitivity and anti-interference ability. The capability of the system to simultaneously detect a small range of RI and T is demonstrated using three-dimensional finite-difference time-domain simulations and the fitting process. The RI sensitivities for the air and dielectric modes were 215 nm/refractive index unit (RIU) and 0 nm/RIU, respectively. The T sensitivities for the air and dielectric modes were 19 pm/K and -83/, respectively. The sensor resists external interference, enabling it to resist the error caused by readings. The footprint of the sensor is 29×1.8µ (×), contributing to future optical on-chip integration sensor design.
我们提出了一种具有高抗干扰能力的传感器，该传感器利用光子晶体腔耦合系统，基于类电磁诱导透明效应同时传感折射率（RI）和温度（T）。通过两个一维光子晶体结构中的空气模式共振和介电模式共振之间的相消干涉，在透射光谱中实现了一个透明窗口。耦合系统中使用了对温度敏感的材料（SU-8），提高了灵敏度和抗干扰能力。利用三维时域有限差分模拟和拟合过程，证明了该系统同时检测小范围RI和T的能力。空气模式和介电模式的RI灵敏度分别为215 nm/折射率单位（RIU）和0 nm/RIU。空气模式和介电模式的T灵敏度分别为19 pm/K和-83/。该传感器能抵抗外部干扰，使其能够抵抗读数引起的误差。该传感器的占地面积为29×1.8µ（×），有助于未来的光学片上集成传感器设计。
