Shooshtari Mostafa, Sacco Leandro Nicolas, Van Ginkel Joost, Vollebregt Sten, Salehi Alireza
Department of Electrical Engineering, K.N. Toosi University of Technology, Tehran 1631714191, Iran.
Laboratory of Electronic Components, Department of Microelectronics, Technology and Materials (ECTM), Delft University of Technology, 2628 CD Delft, The Netherlands.
Materials (Basel). 2022 Feb 13;15(4):1383. doi: 10.3390/ma15041383.
An ethanol gas sensor based on carbon nanofibers (CNFs) with various densities and nanoparticle functionalization was investigated. The CNFs were grown by means of a Plasma-Enhanced Chemical Vapor Deposition (PECVD), and the synthesis conditions were varied to obtain different number of fibers per unit area. The devices with a larger density of CNFs lead to higher responses, with a maximal responsivity of 10%. Furthermore, to simultaneously improve the sensitivity and selectivity, CNFs were decorated with gold nanoparticles by an impaction printing method. After metal decoration, the devices showed a response 300% higher than pristine devices toward 5 ppm of ethanol gas. The morphology and structure of the different samples deposited on a silicon substrate were characterized by TEM, EDX, SEM, and Raman spectroscopy, and the results confirmed the presence of CNF decorated with gold. The influence of operating temperature (OT) and humidity were studied on the sensing devices. In the case of decorated samples with a high density of nanofibers, a less-strong cross-sensitivity was observed toward a variation in humidity and temperature.
研究了一种基于具有不同密度和纳米颗粒功能化的碳纳米纤维(CNF)的乙醇气体传感器。通过等离子体增强化学气相沉积(PECVD)生长CNF,并改变合成条件以获得每单位面积不同数量的纤维。具有较大CNF密度的器件导致更高的响应,最大响应率为10%。此外,为了同时提高灵敏度和选择性,通过冲击印刷法用金纳米颗粒修饰CNF。金属修饰后,器件对5 ppm乙醇气体的响应比原始器件高300%。通过透射电子显微镜(TEM)、能量色散X射线光谱(EDX)、扫描电子显微镜(SEM)和拉曼光谱对沉积在硅衬底上的不同样品的形貌和结构进行了表征,结果证实了金修饰的CNF的存在。研究了工作温度(OT)和湿度对传感器件的影响。在具有高密度纳米纤维的修饰样品的情况下,可以观察到对湿度和温度变化的交叉敏感性较弱。