Lelit Marcin, Słowikowski Mateusz, Filipiak Maciej, Juchniewicz Marcin, Stonio Bartłomiej, Michalak Bartosz, Pavłov Krystian, Myśliwiec Marcin, Wiśniewski Piotr, Kaźmierczak Andrzej, Anders Krzysztof, Stopiński Stanisław, Beck Romuald B, Piramidowicz Ryszard
Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland.
Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland.
Materials (Basel). 2022 Feb 14;15(4):1398. doi: 10.3390/ma15041398.
The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology-basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require fewer manufacturing steps and fabricated elements have larger critical dimensions. In this work, we present and discuss our first results on design and development of fundamental building blocks for silicon nitride integrated photonic platform. The scope of the work covers the full design and manufacturing chain, from numerical simulations of optical elements, design, and fabrication of the test structures to optical characterization and analysis the results. In particular, technological processes were developed and evaluated for fabrication of the waveguides (WGs), multimode interferometers (MMIs), and arrayed waveguide gratings (AWGs), which confirmed the potential of the technology and correctness of the proposed approach.
氮化硅光子集成电路的制造工艺是从微电子元件技术发展而来的——基本工艺有共同的根源，并且可以使用相同类型的设备来执行。与电子元件相比，无源光子结构所需的制造步骤更少，且制造元件的关键尺寸更大。在这项工作中，我们展示并讨论了关于氮化硅集成光子平台基本构建模块的设计与开发的首批成果。工作范围涵盖了完整的设计和制造链，从光学元件的数值模拟、测试结构的设计与制造到光学表征及结果分析。特别是，针对波导（WG）、多模干涉仪（MMI）和阵列波导光栅（AWG）的制造开发并评估了工艺过程，这证实了该技术的潜力以及所提方法的正确性。
