• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

用于可见光、近红外和中红外应用的氮化硅光子集成平台。

Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications.

作者信息

Muñoz Pascual, Micó Gloria, Bru Luis A, Pastor Daniel, Pérez Daniel, Doménech José David, Fernández Juan, Baños Rocío, Gargallo Bernardo, Alemany Rubén, Sánchez Ana M, Cirera Josep M, Mas Roser, Domínguez Carlos

机构信息

Photonics Research Labs, Universitat Politècnica de València, c/ Camino de Vera s/n, 46021 Valencia, Spain.

R&D Department, VLC Photonics S.L., c/ Camino de Vera s/n, 46021 Valencia, Spain.

出版信息

Sensors (Basel). 2017 Sep 12;17(9):2088. doi: 10.3390/s17092088.

DOI:10.3390/s17092088
PMID:28895906
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5620990/
Abstract

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.

摘要

由于氮化硅材料具有宽带特性，氮化硅光子学正在兴起，这使得其在生物光子学、电信/数据通信、光信号处理和传感等领域得到应用，覆盖从可见光到近红外再到中红外的波长范围。本文综述了氮化硅条形波导平台的技术现状，并给出了关于一种通用的300纳米导模膜高氮化硅平台研发的实验结果。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/c3bba47f199b/sensors-17-02088-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/124444fc8034/sensors-17-02088-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/602acbabc412/sensors-17-02088-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/cc61f4aed87f/sensors-17-02088-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/0cf16079f68a/sensors-17-02088-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/271450bcb6c2/sensors-17-02088-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/f3e7d6b86b7c/sensors-17-02088-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/f5127cadb7ce/sensors-17-02088-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/07a0ebd6136a/sensors-17-02088-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/a09e549230fc/sensors-17-02088-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/137c421d234f/sensors-17-02088-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/e2db75f2447c/sensors-17-02088-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/a2c46c61f81d/sensors-17-02088-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/c3bba47f199b/sensors-17-02088-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/124444fc8034/sensors-17-02088-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/602acbabc412/sensors-17-02088-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/cc61f4aed87f/sensors-17-02088-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/0cf16079f68a/sensors-17-02088-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/271450bcb6c2/sensors-17-02088-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/f3e7d6b86b7c/sensors-17-02088-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/f5127cadb7ce/sensors-17-02088-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/07a0ebd6136a/sensors-17-02088-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/a09e549230fc/sensors-17-02088-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/137c421d234f/sensors-17-02088-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/e2db75f2447c/sensors-17-02088-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/a2c46c61f81d/sensors-17-02088-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cc1e/5620990/c3bba47f199b/sensors-17-02088-g011.jpg

相似文献

1
Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications.用于可见光、近红外和中红外应用的氮化硅光子集成平台。
Sensors (Basel). 2017 Sep 12;17(9):2088. doi: 10.3390/s17092088.
2
Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform.可见光集成光子学平台中单片集成的宽带高效硅基氮化硅波导光电探测器。
Nat Commun. 2022 Oct 26;13(1):6362. doi: 10.1038/s41467-022-34100-3.
3
Low-loss TeO-coated SiN waveguides for application in photonic integrated circuits.用于光子集成电路的低损耗碲化氧包覆氮化硅波导。
Opt Express. 2019 Apr 29;27(9):12529-12540. doi: 10.1364/OE.27.012529.
4
Silicon nitride stress-optic microresonator modulator for optical control applications.用于光控应用的氮化硅应力-光学微谐振器调制器。
Opt Express. 2022 Aug 29;30(18):31816-31827. doi: 10.1364/OE.467721.
5
Amorphous-silicon visible-light detector integrated on silicon nitride waveguides.集成在氮化硅波导上的非晶硅可见光探测器。
Opt Lett. 2022 May 15;47(10):2598-2601. doi: 10.1364/OL.455458.
6
Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces.硅-氮化物光子集成电路上薄膜铌酸锂的晶圆级异质集成，具有低损耗键合接口。
Opt Express. 2023 Mar 27;31(7):12005-12015. doi: 10.1364/OE.486944.
7
Resonant Light Guiding Along a Chain of Silicon Nanoparticles.沿硅纳米链导光。
Nano Lett. 2017 Jun 14;17(6):3458-3464. doi: 10.1021/acs.nanolett.7b00381. Epub 2017 May 8.
8
Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared.用于中红外光学微机电系统的带亚波长光栅包层的悬浮硅波导
Micromachines (Basel). 2021 Oct 26;12(11):1311. doi: 10.3390/mi12111311.
9
Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth.用于近红外波长带宽的低损耗氮化硅光子集成电路。
Opt Express. 2023 May 8;31(10):16227-16242. doi: 10.1364/OE.477458.
10
High-Q-factor AlO micro-trench cavities integrated with silicon nitride waveguides on silicon.集成在硅上的与氮化硅波导相结合的高品质因数AlO微沟槽腔。
Opt Express. 2018 Apr 30;26(9):11161-11170. doi: 10.1364/OE.26.011161.

引用本文的文献

1
Study and Characterization of Silicon Nitride Optical Waveguide Coupling with a Quartz Tuning Fork for the Development of Integrated Sensing Platforms.用于集成传感平台开发的氮化硅光波导与石英音叉耦合的研究与特性分析
Sensors (Basel). 2025 Jun 11;25(12):3663. doi: 10.3390/s25123663.
2
Theoretical Analysis of Efficient Thermo-Optic Switching on SiN Waveguide Platform Using SiOC-Based Plasmo-Photonics.基于SiOC的等离激元光子学在SiN波导平台上实现高效热光开关的理论分析
Nanomaterials (Basel). 2025 Feb 15;15(4):296. doi: 10.3390/nano15040296.
3
High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay.

本文引用的文献

1
Label-free bimodal waveguide immunosensor for rapid diagnosis of bacterial infections in cirrhotic patients.无标记双模波导免疫传感器，用于快速诊断肝硬化患者的细菌感染。
Biosens Bioelectron. 2016 Nov 15;85:310-316. doi: 10.1016/j.bios.2016.04.095. Epub 2016 Apr 30.
2
Higher order mode suppression in high-Q anomalous dispersion SiN microresonators for temporal dissipative Kerr soliton formation.用于时间耗散克尔孤子形成的高Q反常色散氮化硅微谐振器中的高阶模式抑制
Opt Lett. 2016 Feb 1;41(3):452-5. doi: 10.1364/OL.41.000452.
3
Ultra-low temperature silicon nitride photonic integration platform.
具有非晶硅覆盖层的氮化硅高效自聚焦超材料光栅耦合器。
Sci Rep. 2024 May 22;14(1):11651. doi: 10.1038/s41598-024-62336-0.
4
Biohybrid Photonic Platform for Subcellular Stimulation and Readout of In Vitro Neurons.用于体外神经元亚细胞刺激和读出的生物杂交光子学平台。
Adv Sci (Weinh). 2024 Mar;11(12):e2304561. doi: 10.1002/advs.202304561. Epub 2024 Jan 2.
5
Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection.用于低损耗且制造稳健的光纤-芯片互连的单蚀刻氮化硅光栅耦合器库。
Sci Rep. 2023 Oct 14;13(1):17467. doi: 10.1038/s41598-023-44824-x.
6
Hybrid Silicon Nitride Photonic Integrated Circuits Covered by Single-Walled Carbon Nanotube Films.由单壁碳纳米管薄膜覆盖的混合氮化硅光子集成电路
Nanomaterials (Basel). 2023 Aug 11;13(16):2307. doi: 10.3390/nano13162307.
7
Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators.亚伏特和高带宽可见光到近红外电光调制器。
Nat Commun. 2023 Mar 27;14(1):1496. doi: 10.1038/s41467-023-36870-w.
8
Multi-color flow cytometer with PIC-based structured illumination.具有基于PIC的结构照明的多色流式细胞仪。
Biomed Opt Express. 2022 Sep 6;13(10):5098-5115. doi: 10.1364/BOE.464903. eCollection 2022 Oct 1.
9
Dispersive silicon-nitride optical phased array incorporating arrayed waveguide delay lines for passive line beam scanning.采用阵列波导延迟线实现无源线波束扫描的色散氮化硅光学相控阵。
Sci Rep. 2022 Nov 5;12(1):18759. doi: 10.1038/s41598-022-23456-7.
10
Thermo-optic tuning of silicon nitride microring resonators with low loss non-volatile [Formula: see text] phase change material.采用低损耗非易失性[化学式：见原文]相变材料对氮化硅微环谐振器进行热光调谐。
Sci Rep. 2022 Oct 24;12(1):17815. doi: 10.1038/s41598-022-21590-w.
超低温氮化硅光子集成平台
Opt Express. 2016 Feb 8;24(3):1865-72. doi: 10.1364/OE.24.001865.
4
Broadband mid-infrared frequency comb generation in a Si(3)N(4) microresonator.硅基氮化硅微谐振器中宽带中红外频率梳的产生
Opt Lett. 2015 Nov 1;40(21):4823-6. doi: 10.1364/OL.40.004823.
5
Linear and nonlinear characterization of low-stress high-confinement silicon-rich nitride waveguides.低应力高限制富硅氮化物波导的线性和非线性特性
Opt Express. 2015 Oct 5;23(20):25827-37. doi: 10.1364/OE.23.025827.
6
Visible-to-near-infrared octave spanning supercontinuum generation in a silicon nitride waveguide.氮化硅波导中可见到近红外倍频程超连续谱的产生
Opt Lett. 2015 May 15;40(10):2177-80. doi: 10.1364/OL.40.002177.
7
Low-loss compact multilayer silicon nitride platform for 3D photonic integrated circuits.用于三维光子集成电路的低损耗紧凑型多层氮化硅平台。
Opt Express. 2015 Aug 10;23(16):21334-42. doi: 10.1364/OE.23.021334.
8
On-chip visible-to-infrared supercontinuum generation with more than 495 THz spectral bandwidth.片上可见到红外超连续谱产生，光谱带宽超过495太赫兹。
Opt Express. 2015 Jul 27;23(15):19596-604. doi: 10.1364/OE.23.019596.
9
Stress-optic modulator in TriPleX platform using a ezoelectric lead zirconate titanate (PZT) thin film.TriPleX平台中使用锆钛酸铅（PZT）压电薄膜的应力光调制器。
Opt Express. 2015 Jun 1;23(11):14018-26. doi: 10.1364/OE.23.014018.
10
High confinement, high yield Si(3)N(4) waveguides for nonlinear optical applications.用于非线性光学应用的高限制、高产率氮化硅（Si₃N₄）波导。
Opt Express. 2015 Jan 26;23(2):642-8. doi: 10.1364/OE.23.000642.