用于可见光、近红外和中红外应用的氮化硅光子集成平台。

Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications.

作者信息

Muñoz Pascual, Micó Gloria, Bru Luis A, Pastor Daniel, Pérez Daniel, Doménech José David, Fernández Juan, Baños Rocío, Gargallo Bernardo, Alemany Rubén, Sánchez Ana M, Cirera Josep M, Mas Roser, Domínguez Carlos

机构信息

Photonics Research Labs, Universitat Politècnica de València, c/ Camino de Vera s/n, 46021 Valencia, Spain.

R&D Department, VLC Photonics S.L., c/ Camino de Vera s/n, 46021 Valencia, Spain.

出版信息

Sensors (Basel). 2017 Sep 12;17(9):2088. doi: 10.3390/s17092088.

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.