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基于MEMS仿生鱼耳结构的新型医用声学传感器设计

Design of a Novel Medical Acoustic Sensor Based on MEMS Bionic Fish Ear Structure.

作者信息

Zhou Chenzheng, Zang Junbin, Xue Chenyang, Ma Yuexuan, Hua Xiaoqiang, Gao Rui, Zhang Zengxing, Li Bo, Zhang Zhidong

机构信息

State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2022 Jan 22;13(2):163. doi: 10.3390/mi13020163.

DOI:10.3390/mi13020163
PMID:35208288
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8880548/
Abstract

High-performance medical acoustic sensors are essential in medical equipment and diagnosis. Commercially available medical acoustic sensors are capacitive and piezoelectric types. When they are used to detect heart sound signals, there is attenuation and distortion due to the sound transmission between different media. This paper proposes a new bionic acoustic sensor based on the fish ear structure. Through theoretical analysis and finite element simulation, the optimal parameters of the sensitive structure are determined. The sensor is fabricated using microelectromechanical systems (MEMS) technology, and is encapsulated in castor oil, which has an acoustic impedance close to the human body. An electroacoustic test platform is built to test the performance of the sensor. The results showed that the MEMS bionic sensor operated with a bandwidth of 20-2k Hz. Its linearity and frequency responses were better than the electret microphone. In addition, the sensor was tested for heart sound collection application to verify its effectiveness. The proposed sensor can be effectively used in clinical auscultation and has a high SNR.

摘要

高性能医用声学传感器在医疗设备和诊断中至关重要。市售的医用声学传感器有电容式和压电式两种。当它们用于检测心音信号时，由于不同介质之间的声音传播，会存在衰减和失真。本文提出了一种基于鱼耳结构的新型仿生声学传感器。通过理论分析和有限元模拟，确定了敏感结构的最佳参数。该传感器采用微机电系统（MEMS）技术制造，并封装在声阻抗接近人体的蓖麻油中。搭建了电声测试平台来测试传感器的性能。结果表明，该MEMS仿生传感器的工作带宽为20 - 2kHz。其线性度和频率响应优于驻极体麦克风。此外，对该传感器进行了心音采集应用测试以验证其有效性。所提出的传感器可有效用于临床听诊，且具有高信噪比。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ec8/8880548/da21ccebfc3a/micromachines-13-00163-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ec8/8880548/fd8b9e7fe4b2/micromachines-13-00163-g005.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ec8/8880548/f02b0ba56b20/micromachines-13-00163-g009.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ec8/8880548/53217768acb4/micromachines-13-00163-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ec8/8880548/6e7ade561688/micromachines-13-00163-g007.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ec8/8880548/727df7748490/micromachines-13-00163-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ec8/8880548/da21ccebfc3a/micromachines-13-00163-g011.jpg

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