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具有凹形、球拍状纤毛的 MEMS 心音传感器的设计与实现。

Design and Realization of MEMS Heart Sound Sensor with Concave, Racket-Shaped Cilium.

机构信息

State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

出版信息

Biosensors (Basel). 2022 Jul 18;12(7):534. doi: 10.3390/bios12070534.

DOI:10.3390/bios12070534
PMID:35884337
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9312695/
Abstract

The biomedical acoustic signal plays an important role in clinical non-invasive diagnosis. In view of the deficiencies in early diagnosis of cardiovascular diseases, acoustic properties of and heart sounds are utilized. In this paper, we propose an integrated concave cilium MEMS heart sound sensor. The concave structure enlarges the area for receiving sound waves to improve the low-frequency sensitivity, and realizes the low-frequency and high-sensitivity characteristics of an MEMS heart sound sensor by adopting a reasonable acoustic package design, reducing the loss of heart sound distortion and faint heart murmurs, and improving the auscultation effect. Finally, experimental results show that the integrated concave ciliated MEMS heart sound sensor's sensitivity reaches -180.6 dB@500 Hz, as compared with the traditional bionic ciliated MEMS heart sound sensor; the sensitivity is 8.9 dB higher. The sensor has a signal-to-noise ratio of 27.05 dB, and has good heart sound detection ability, improving the accuracy of clinical detection methods.

摘要

生物医学声学信号在临床无创诊断中起着重要作用。鉴于心血管疾病早期诊断的不足，利用心音的声学特性。在本文中，我们提出了一种集成凹纤毛 MEMS 心音传感器。凹结构扩大了接收声波的面积，以提高低频灵敏度，并通过采用合理的声学封装设计实现了 MEMS 心音传感器的低频和高灵敏度特性，减少了心音失真和微弱心杂音的损失，提高了听诊效果。最后，实验结果表明，集成凹纤毛 MEMS 心音传感器的灵敏度达到-180.6 dB@500 Hz，与传统仿生纤毛 MEMS 心音传感器相比，灵敏度提高了 8.9 dB。该传感器的信噪比为 27.05 dB，具有良好的心音检测能力，提高了临床检测方法的准确性。

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