Zhang Lanxuan, Li Yingzhi, Chen Bosong, Wang Yubing, Li Hongmei, Hou Yu, Tao Min, Li Yuxuan, Zhi Zihao, Liu Xiaobin, Li Xuetong, Na Quanxin, Xie Qijie, Zhang Mingshi, Li Xueyan, Gao Fengli, Luo Xianshu, Lo Guo-Qiang, Song Junfeng
Opt Express. 2022 Feb 14;30(4):5008-5018. doi: 10.1364/OE.446733.
Silicon based optoelectronic integrated optical phased array is attractive owing to large-dense integration, large scanning range and CMOS compatibility. In this paper, we design and fabricate a SiN-on-SOI two-dimensional optical phased array chip. We demonstrate a two-dimensional scanning range of 96°×14.4° and 690 mW peak power of the main lobe. Additionally, we set up the time of flight (ToF) and frequency-modulated continuous-wave (FMCW) ranging systems by using this optical phased array chip, and achieve the objects detection at the range of 20 m in the ToF system and 109 m in the FMCW system, respectively.
基于硅的光电集成光学相控阵因其具有大密度集成、大扫描范围和CMOS兼容性而备受关注。在本文中，我们设计并制造了一种硅基绝缘体上氮化硅二维光学相控阵芯片。我们展示了96°×14.4°的二维扫描范围以及主瓣690 mW的峰值功率。此外，我们利用该光学相控阵芯片搭建了飞行时间（ToF）和调频连续波（FMCW）测距系统，分别在ToF系统中实现了20 m范围内的目标检测，在FMCW系统中实现了109 m范围内的目标检测。
