Hu Mingxuan, Pang Yajun, Gao Long
Center for Advanced Laser Technology, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China.
Hebei Key Laboratory of Advanced Laser Technology and Equipment, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China.
Sensors (Basel). 2023 Jun 26;23(13):5920. doi: 10.3390/s23135920.
Silicon-based Lidar is an ideal way to reduce the volume of the Lidar and realize monolithic integration. It removes the moving parts in the conventional device and realizes solid-state beam steering. The advantages of low cost, small size, and high beam steering speed have attracted the attention of many researchers. In order to facilitate researchers to quickly understand the research progress and direction, this paper mainly describes the research progress of silicon-based integrated Lidar, including silicon-based optical phased array Lidar, silicon-based optical switch array Lidar, and continuous frequency-modulated wave Lidar. In addition, we also introduced the scanning modes and working principles of other kinds of Lidar, such as the Micro-Electro-Mechanical System, mechanical Lidar, etc., and analyzed the characteristics of the Lidars above. Finally, we summarized this paper and put forward the future expectations of silicon-based integrated Lidar.
基于硅的激光雷达是减小激光雷达体积并实现单片集成的理想方式。它去除了传统设备中的移动部件，实现了固态光束转向。低成本、小尺寸和高光束转向速度等优点吸引了众多研究人员的关注。为便于研究人员快速了解研究进展和方向，本文主要介绍基于硅的集成激光雷达的研究进展，包括基于硅的光学相控阵激光雷达、基于硅的光开关阵列激光雷达和连续调频波激光雷达。此外，我们还介绍了其他类型激光雷达的扫描模式和工作原理，如微机电系统、机械激光雷达等，并分析了上述激光雷达的特点。最后，我们总结了本文内容，并对基于硅的集成激光雷达提出了未来期望。
