Xu Lida, Cui Zaifu, Li Lanlan, He Yingping, Wu Chao, Chen Guochun, Li Xin, He Gonghan, Hai Zhenyin, Chen Qinnan, Sun Daoheng
Department of Mechanical and Electrical Engineering, School of Aerospace Engineering, Xiamen University, Xiamen 361102, China.
Fujian Micro/nano Manufacturing Engineering Technology Research Center, Xiamen University, Xiamen 361102, China.
ACS Appl Mater Interfaces. 2022 Mar 16;14(10):12652-12661. doi: 10.1021/acsami.1c24628. Epub 2022 Mar 1.
Polymer-derived ceramic (PDC) is considered an excellent sensing material for harsh environments such as aero-engines and nuclear reactors. However, there are many inherent limitations not only in pure PDC but also in its common fabrication method by furnace thermolysis. Therefore, this study proposes a novel method of rapid fabrication of PDC composite thin-film sensors by laser pyrolysis. Using this method with different fillers, a sensitive PDC composite film layer with high-quality graphite can be obtained quickly, which is more flexible and efficient compared to the traditional furnace thermolysis. Furthermore, this study analyzes the reaction differences between laser pyrolysis and furnace thermolysis. The laser pyrolysis method principally produces β-SiC and enhances the graphitization of amorphous carbon, while the degree of graphitization by furnace thermolysis is low. In addition, it is capable of rapidly preparing an insulating PDC composite film, which still has a resistance of 5 MΩ at 600 °C. As a proof of this method, the PDC composite thin-film strain sensors are fabricated on nickel alloys and aluminum oxide substrates, respectively. The sensor fabricated on the nickel alloy with a high gauge factor of over 100 can be used in high-temperature environments below 350 °C without the protection of an oxidation-resistant coating. In this way, the approach pioneers the laser fabrication of functional PDC films for sensors, and it has great potential for the sensing of complex curved surfaces in harsh environments.
聚合物衍生陶瓷（PDC）被认为是用于航空发动机和核反应堆等恶劣环境的优良传感材料。然而，不仅纯PDC存在许多固有局限性，其通过炉内热解的常见制造方法也存在局限性。因此，本研究提出了一种通过激光热解快速制造PDC复合薄膜传感器的新方法。使用这种方法并添加不同的填料，可以快速获得含有高质量石墨的灵敏PDC复合膜层，与传统的炉内热解相比，该方法更加灵活高效。此外，本研究分析了激光热解和炉内热解之间的反应差异。激光热解方法主要生成β-SiC并增强无定形碳的石墨化程度，而炉内热解的石墨化程度较低。此外，它能够快速制备绝缘的PDC复合膜，在600℃时其电阻仍为5MΩ。作为该方法的验证，分别在镍合金和氧化铝基板上制造了PDC复合薄膜应变传感器。在镍合金上制造的传感器具有超过100的高应变系数，可以在350℃以下的高温环境中使用，无需抗氧化涂层保护。通过这种方式，该方法开创了用于传感器的功能性PDC薄膜的激光制造，并且在恶劣环境中对复杂曲面的传感方面具有巨大潜力。
