Laser Fabrication of Polymer-Derived Ceramic Composite Thin-Film Sensors for Harsh Environments.

Polymer-derived ceramic (PDC) is considered an excellent sensing material for harsh environments such as aero-engines and nuclear reactors. However, there are many inherent limitations not only in pure PDC but also in its common fabrication method by furnace thermolysis. Therefore, this study proposes a novel method of rapid fabrication of PDC composite thin-film sensors by laser pyrolysis. Using this method with different fillers, a sensitive PDC composite film layer with high-quality graphite can be obtained quickly, which is more flexible and efficient compared to the traditional furnace thermolysis. Furthermore, this study analyzes the reaction differences between laser pyrolysis and furnace thermolysis. The laser pyrolysis method principally produces β-SiC and enhances the graphitization of amorphous carbon, while the degree of graphitization by furnace thermolysis is low. In addition, it is capable of rapidly preparing an insulating PDC composite film, which still has a resistance of 5 MΩ at 600 °C. As a proof of this method, the PDC composite thin-film strain sensors are fabricated on nickel alloys and aluminum oxide substrates, respectively. The sensor fabricated on the nickel alloy with a high gauge factor of over 100 can be used in high-temperature environments below 350 °C without the protection of an oxidation-resistant coating. In this way, the approach pioneers the laser fabrication of functional PDC films for sensors, and it has great potential for the sensing of complex curved surfaces in harsh environments.