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脉冲激光辅助直接制备用于高温应用的具有优异性能的基于MoWS合金的柔性应变传感器。

Pulsed laser-assisted direct fabrication of MoWS alloy-based flexible strain sensors with superior performance for high-temperature applications.

作者信息

Wang Kexin, Wang Hanxin, Zhang Xiaoshan, Li Yingzhe, Zhou Yilin, Xu Manzhang, Li Weiwei, Zheng Lu, Wang Xuewen, Huang Wei

机构信息

State Key Laboratory of Flexible Electronics (LoFE) & Institute of Flexible Electronics (IFE), Northwestern Polytechnical University, Xi'an, 710072, China.

Shaanxi Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China.

出版信息

Microsyst Nanoeng. 2025 Aug 19;11(1):161. doi: 10.1038/s41378-025-01014-1.

Abstract

Flexible strain sensors with high sensitivity and stability at high temperatures are significantly desirable for their accurate and long-term signal detection in wearable devices, environment monitoring, and aerospace electronics. Despite the considerable efforts in materials development and structural design, it remains a challenge to develop highly sensitive, flexible strain sensors operating at high temperatures due to the trade-off between sensitivity and stability for the representative sensing materials. Herein, we develop a high-temperature flexible sensor using MoWS alloy films. A pulsed laser is introduced to directly synthesize MoWS patterns with controllable compositions and physical parameters, enabling the realization of flexible sensors without photolithography or transfer procedures. The resultant flexible sensors exhibit a high gauge factor of 97.4, a low strain detection of 4.9 με, and strong tolerance to a temperature of 500 °C. Owing to its superior performance, we develop a wireless acoustic recognition system to distinguish tiny strain signals of tuning forks with a vibration frequency up to 128 Hz under extreme temperature conditions. The laser method for the direct fabrication of MoWS alloy-based flexible sensors holds great potential in the precise detection of strain signals from complex structures at high temperatures.

摘要

具有高灵敏度和高温稳定性的柔性应变传感器对于在可穿戴设备、环境监测和航空航天电子领域进行准确的长期信号检测非常重要。尽管在材料开发和结构设计方面付出了巨大努力,但由于代表性传感材料在灵敏度和稳定性之间存在权衡,开发在高温下运行的高灵敏度柔性应变传感器仍然是一项挑战。在此,我们使用MoWS合金薄膜开发了一种高温柔性传感器。引入脉冲激光直接合成具有可控成分和物理参数的MoWS图案,无需光刻或转移工艺即可实现柔性传感器。所得柔性传感器具有97.4的高应变计因子、4.9 με的低应变检测能力以及对500°C温度的强耐受性。由于其卓越的性能,我们开发了一种无线声学识别系统,以在极端温度条件下区分振动频率高达128 Hz的音叉的微小应变信号。用于直接制造基于MoWS合金的柔性传感器的激光方法在高温下精确检测复杂结构的应变信号方面具有巨大潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ef7b/12365116/b7ce56ec7e91/41378_2025_1014_Fig1_HTML.jpg

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