Wang Yusen, Xu Lida, Zhou Xiong, Zhao Fuxin, Liu Jun, Wang Siqi, Sun Daoheng, Chen Qinnan
Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361102, China.
Materials (Basel). 2024 Aug 1;17(15):3792. doi: 10.3390/ma17153792.
Direct ink writing (DIW) of high-temperature thin-film sensors holds significant potential for monitoring extreme environments. However, existing high-temperature inks face a trade-off between cost and performance. This study proposes a SiCN/RuO/TiB composite ceramic ink. The added TiB, after annealing in a high-temperature atmospheric environment, forms BO glass, which synergizes with the SiO glass phase formed from the SiCN precursor to effectively encapsulate RuO particles. This enhances the film's density and adhesion to the substrate, preventing RuO volatilization at high temperatures. Additionally, the high conductivity of TiB improves the film's overall conductivity. Test results indicate that the SiCN/RuO/TiB film exhibits high linearity from room temperature to 900 °C, high stability (resistance drift rate of 0.1%/h at 800 °C), and high conductivity (4410 S/m). As a proof of concept, temperature sensors and a heat flux sensor were successfully fabricated on a metallic hemispherical surface. Performance tests in extreme environments using high-power lasers and flame guns verified that the conformal thin-film sensor can accurately measure spherical temperature and heat flux, with a heat flux sensor response time of 53 ms. In conclusion, the SiCN/RuO/TiB composite ceramic ink developed in this study offers a high-performance and cost-effective solution for high-temperature conformal thin-film sensors in extreme environments.
高温薄膜传感器的直接墨水书写（DIW）在监测极端环境方面具有巨大潜力。然而，现有的高温墨水在成本和性能之间存在权衡。本研究提出了一种SiCN/RuO/TiB复合陶瓷墨水。添加的TiB在高温大气环境中退火后形成BO玻璃，它与由SiCN前驱体形成的SiO玻璃相协同作用，有效地封装RuO颗粒。这提高了薄膜的密度和与基板的附着力，防止RuO在高温下挥发。此外，TiB的高电导率提高了薄膜的整体电导率。测试结果表明，SiCN/RuO/TiB薄膜在室温至900°C范围内表现出高线性度、高稳定性（800°C时电阻漂移率为0.1%/h）和高电导率（4410 S/m）。作为概念验证，在金属半球形表面上成功制造了温度传感器和热通量传感器。使用高功率激光和火焰喷枪在极端环境中的性能测试验证了保形薄膜传感器能够准确测量球形温度和热通量，热通量传感器的响应时间为53毫秒。总之，本研究开发的SiCN/RuO/TiB复合陶瓷墨水为极端环境中的高温保形薄膜传感器提供了一种高性能且经济高效的解决方案。
