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用于摩擦学涂层的离子铣削和热处理法制备纳米晶氮化硼薄膜的合成与表征:一种量化生长动态过程的方法

Synthesis and Characterization of Nanocrystalline Boron-Nitride Thin Films by Ion Milling and Thermal Treatment for Tribological Coatings: An Approach to Quantifying the Growth Dynamic Process.

作者信息

Monezi Carlos Alberto, Grigorov Korneli Grigoriev, Tsanev Aleksandar, Godoy Armstrong, Couto Antonio Augusto, Lima Arnaldo Oliveira, Avdeev Georgi, Iankov Roumen, Massi Marcos

机构信息

School of Engineering-PPGEMN, Mackenzie Presbyterian University, Rua da Consolação, 930, São Paulo 01302-907, SP, Brazil.

Space Research and Technology Institute, Bulgarian Academy of Sciences, Acad. G. Bonchev Str. Bl. 1, 1113 Sofia, Bulgaria.

出版信息

Materials (Basel). 2022 Feb 25;15(5):1761. doi: 10.3390/ma15051761.

Abstract

Hexagonal boron-nitride nanoparticle coating was deposited on AISI 1045 steel surface. The deposition process included a transformation of B-containing thin organic film into nanocrystalline BN using two methods: thermal annealing at 450-850 °C and reactive ion etching in Ar/N plasma. The film structure, phases, and film morphology of deposited nanoparticles of boron nitride on AISI 1045 steel were characterized by XPS, XRD, and EDS. Post-annealing at 450 °C does not lead to the formation of a BN phase in the layer. A non-stoichiometric BN phase with nitrogen deficiency appears at 650 °C. At 850 °C annealing, the formed BN phase is completely stoichiometric. The effects of deposited and incorporated BN on the friction and hardness properties of AISI 1045 steel were also studied. The post-annealing process improved the hardness from 5.35 to 11.4 GPa, showing a pronounced linear temperature dependence. An original approach was adopted to quantify the energy-dependent growth constants based on the indentation load-discharge curves measured on samples treated under different conditions. Those constants describe the rate of the reactions and the type of interdiffusion process characteristic for each material used. This approach can partially fulfill the role of the Rutherford backscattering spectrometry profile, which is an expensive and time-consuming process, mainly when light elements such as boron and nitrogen are used.

摘要

在AISI 1045钢表面沉积了六方氮化硼纳米颗粒涂层。沉积过程包括使用两种方法将含硼的有机薄膜转变为纳米晶氮化硼:在450 - 850°C下进行热退火以及在Ar/N等离子体中进行反应离子蚀刻。通过XPS、XRD和EDS对沉积在AISI 1045钢上的氮化硼纳米颗粒的薄膜结构、相和薄膜形态进行了表征。在450°C下进行后退火不会导致在该层中形成氮化硼相。在650°C时出现了氮缺乏的非化学计量氮化硼相。在850°C退火时,形成的氮化硼相完全是化学计量的。还研究了沉积和掺入的氮化硼对AISI 1045钢摩擦和硬度性能的影响。后退火过程将硬度从5.35 GPa提高到了11.4 GPa,呈现出明显的线性温度依赖性。采用了一种原始方法,基于在不同条件下处理的样品上测量的压痕加载 - 卸载曲线来量化能量相关的生长常数。这些常数描述了反应速率以及每种所用材料特有的互扩散过程类型。这种方法可以部分替代卢瑟福背散射光谱分析的作用,卢瑟福背散射光谱分析是一个昂贵且耗时的过程,尤其是在使用硼和氮等轻元素时。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f9ef/8911460/faa5253229ca/materials-15-01761-g001.jpg

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