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用于功能应用的二维垂直范德华异质结构和超晶格的可控制备

Controllable Preparation of 2D Vertical van der Waals Heterostructures and Superlattices for Functional Applications.

作者信息

Li Jia, Liang Jingyi, Yang Xiangdong, Li Xin, Zhao Bei, Li Bo, Duan Xidong

机构信息

Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, 410012, P. R. China.

School of Physics and Electronics, Hunan University, Changsha, P. R. China.

出版信息

Small. 2022 Jun;18(22):e2107059. doi: 10.1002/smll.202107059. Epub 2022 Mar 17.

Abstract

2D van der Waals heterostructures (vdWHs) and superlattices (SLs) with exotic physical properties and applications for new devices have attracted immense interest. Compared to conventionally bonded heterostructures, the dangling-bond-free surface of 2D layered materials allows for the feasible integration of various materials to produce vdWHs without the requirements of lattice matching and processing compatibility. The quality of interfaces in artificially stacked vdWHs/vdWSLs and scalability of production remain among the major challenges in the field of 2D materials. Fortunately, bottom-up methods exhibit relatively high controllability and flexibility. The growth parameters, such as the temperature, precursors, substrate, and carrier gas, can be carefully and comprehensively controlled to produce high-quality interfaces and wafer-scale products of vdWHs/vdWSLs. This review focuses on three types of bottom-up methods for the assembly of vdWHs and vdWSLs with atomically clean and electronically sharp interfaces: chemical/physical vapor deposition, metal-organic chemical vapor deposition, and ultrahigh vacuum growth. These methods can intuitively illustrate the great flexibility and controllability of bottom-up methods for the preparation of vdWHs/vdWSLs. The latest progress in vdWHs and vdWSLs, related physical phenomena, and (opto)electronic devices are summarized. Finally, the authors discuss current challenges and future perspectives in the synthesis and application of vdWHs and vdWSLs.

摘要

具有奇异物理性质及适用于新型器件的二维范德华异质结构(vdWHs)和超晶格(SLs)引起了人们极大的兴趣。与传统键合的异质结构相比,二维层状材料无悬键的表面使得各种材料能够进行可行的集成,从而制备vdWHs,而无需晶格匹配和工艺兼容性的要求。人工堆叠的vdWHs/vdWSLs中界面的质量以及生产的可扩展性仍然是二维材料领域的主要挑战。幸运的是,自下而上的方法表现出相对较高的可控性和灵活性。诸如温度、前驱体、衬底和载气等生长参数可以得到仔细且全面的控制,以生产出具有高质量界面的vdWHs/vdWSLs晶圆级产品。本综述重点关注三种用于组装具有原子级清洁和电子锐界面的vdWHs和vdWSLs的自下而上方法:化学/物理气相沉积、金属有机化学气相沉积和超高真空生长。这些方法可以直观地说明自下而上方法在制备vdWHs/vdWSLs方面的巨大灵活性和可控性。总结了vdWHs和vdWSLs的最新进展、相关物理现象以及(光)电子器件。最后,作者讨论了vdWHs和vdWSLs合成与应用中的当前挑战和未来前景。

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