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通过二维范德华金属接触实现的无费米能级钉扎的WSe晶体管及其电路

Fermi-Level Pinning-Free WSe Transistors via 2D Van der Waals Metal Contacts and Their Circuits.

作者信息

Jang Jisu, Ra Hyun-Soo, Ahn Jongtae, Kim Tae Wook, Song Seung Ho, Park Soohyung, Taniguch Takashi, Watanabe Kenji, Lee Kimoon, Hwang Do Kyung

机构信息

Center for Opto-Electronic Materials and Devices, Post-Silicon Semiconductor Institute, Korea Institute of Science and Technology (KIST), Seoul, 02792, Republic of Korea.

Division of Nano & Information Technology, KIST School, University of Science and Technology (UST), Seoul, 02792, Republic of Korea.

出版信息

Adv Mater. 2022 May;34(19):e2109899. doi: 10.1002/adma.202109899. Epub 2022 Apr 4.

Abstract

Precise control over the polarity of transistors is a key necessity for the construction of complementary metal-oxide-semiconductor circuits. However, the polarity control of 2D transistors remains a challenge because of the lack of a high-work-function electrode that completely eliminates Fermi-level pinning at metal-semiconductor interfaces. Here, a creation of clean van der Waals contacts is demonstrated, wherein a metallic 2D material, chlorine-doped SnSe (Cl-SnSe ), is used as the high-work-function contact, providing an interface that is free of defects and Fermi-level pinning. Such clean contacts made from Cl-SnSe can pose nearly ideal Schottky barrier heights, following the Schottky-Mott limit and thus permitting polarity-controllable transistors. With the integration of Cl-SnSe as contacts, WSe transistors exhibit pronounced p-type characteristics, which are distinctly different from those of the devices with evaporated metal contacts, where n-type transport is observed. Finally, this ability to control the polarity enables the fabrication of functional logic gates and circuits, including inverter, NAND, and NOR.

摘要

对晶体管极性的精确控制是构建互补金属氧化物半导体电路的关键必要条件。然而,二维晶体管的极性控制仍然是一个挑战,因为缺乏能够完全消除金属 - 半导体界面处费米能级钉扎的高功函数电极。在此,展示了一种创建清洁范德华接触的方法,其中一种金属二维材料,氯掺杂的硒化锡(Cl - SnSe)被用作高功函数接触,提供了一个无缺陷且无费米能级钉扎的界面。由Cl - SnSe制成的这种清洁接触可以呈现出接近理想的肖特基势垒高度,遵循肖特基 - 莫特极限,从而允许实现极性可控的晶体管。通过将Cl - SnSe集成作为接触,硒化钨晶体管表现出明显的p型特性,这与具有蒸发金属接触的器件明显不同,后者观察到的是n型传输。最后,这种控制极性的能力使得能够制造包括反相器、与非门和或非门在内的功能性逻辑门和电路。

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