薄膜沉积对AFM悬臂梁探针在MEMS表面附着力和杨氏模量方面的影响。

Influence of Thin Film Deposition on AFM Cantilever Tips in Adhesion and Young's Modulus of MEMS Surfaces.

作者信息

Heidari Pedram, Salehi Majid, Ruhani Behrooz, Purcar Violeta, Căprărescu Simona

机构信息

Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad 8514143131, Iran.

National Institute for Research & Development in Chemistry and Petrochemistry-ICECHIM, Splaiul Independentei No. 202, 6th District, 060021 Bucharest, Romania.

出版信息

Materials (Basel). 2022 Mar 12;15(6):2102. doi: 10.3390/ma15062102.

DOI:10.3390/ma15062102

PMID:35329554

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8955253/

Abstract

Adhesion is a critical factor in microelectromechanical systems (MEMSs) and is influenced by many parameters. In important fields, such as microassembly, an improved understanding of adhesion can result in higher precision. This study examines the influence of deposition of gold and titanium onto the atomic force microscope (AFM) tips in adhesion forces and Young's modulus, between a few MEMS substrates (silicon, gold, and silver) and the AFM tips. It was found that, except for gold substrate, an AFM tip coated with gold has the highest adhesion force of 42.67 nN for silicon substrates, whereas the titanium-coated AFM tip decreases the force for all the samples. This study suggests that such changes must be taken into account while studying the adhesion force. The final results indicate that utilizing gold substrate with titanium AFM tip led to the lowest adhesion force, which could be useful in adhesion force measurement during microassembly.

摘要

粘附力是微机电系统（MEMS）中的一个关键因素，并且受到许多参数的影响。在诸如微装配等重要领域，对粘附力的深入理解能够带来更高的精度。本研究考察了在几种MEMS衬底（硅、金和银）与原子力显微镜（AFM）探针之间，金和钛沉积到AFM探针上对粘附力和杨氏模量的影响。研究发现，除了金衬底外，涂有金的AFM探针与硅衬底之间的粘附力最高，为42.67 nN，而涂有钛的AFM探针使所有样品的粘附力降低。该研究表明，在研究粘附力时必须考虑到这些变化。最终结果表明，使用金衬底搭配涂有钛的AFM探针会导致最低的粘附力，这在微装配过程中的粘附力测量中可能会很有用。