Xu Fahu, Qiao Dayong, Xia Changfeng, Song Xiumin, Zheng Wenhui, He Yaojun, Fan Qiaodan
Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China.
Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China.
Micromachines (Basel). 2022 Feb 23;13(3):353. doi: 10.3390/mi13030353.
MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.
基于微机电系统（MEMS）的低成本、小体积激光雷达是三维测量的一种很有前景的解决方案。本文在分立轴李萨如扫描MEMS激光雷达系统中提出了一种可重构角分辨率设计方法。该设计方法揭示了影响角分辨率的因素，包括MEMS反射镜的特性、激光占空比和脉冲宽度、回波信号的处理时间、MEMS反射镜的控制精度以及激光发散角。进行了仿真以表明获得不同角分辨率需要哪些条件。0.2°×0.62°和0.2°×0.15°（水平×垂直）角分辨率的实验结果证明了该设计方法通过采用具有不同特性的MEMS反射镜在分立轴李萨如扫描MEMS激光雷达系统中实现可重构角分辨率的可行性。本研究为MEMS激光雷达获得高且灵活的角分辨率提供了合理的可能性。
