Wang Junya, Zhang Gaofei, You Zheng
Department of Precision Instrument, Tsinghua University, Beijing, China.
State Key Laboratory of Precision Testing Technology and Instruments, Tsinghua University, 10084 Beijing, China.
Microsyst Nanoeng. 2020 Nov 16;6:101. doi: 10.1038/s41378-020-00211-4. eCollection 2020.
Lissajous microscanners are very popular in compact laser-scanning applications, such as solid-state light detection and ranging (LIDAR), owing to their high-quality factor and low power consumption. In the Lissajous scanner driven by a two-axis micro-electro-mechanical system scanning mirror (MEMS-SM), the design theory is insufficient to meet the temporal and spatial resolution at the same time. In this paper, the greatest common divisor of the two-axis driving frequency is used as the temporal resolution, the concept of the fill factor (FF) is used to describe the spatial resolution of the scanner, and a general algorithm for calculating the FF is presented. Combined with the characteristics of the Lissajous trajectory, three design rules of the general Lissajous scanner are proposed, and the design theory of the Lissajous scanner enabling MEMS LIDAR is perfected. Experimental results show that the proposed design rules can effectively meet the LIDAR design requirements.
李萨如微扫描仪因其高品质因数和低功耗，在诸如固态光探测与测距（激光雷达）等紧凑型激光扫描应用中非常受欢迎。在由两轴微机电系统扫描镜（MEMS-SM）驱动的李萨如扫描仪中，设计理论不足以同时满足时间分辨率和空间分辨率。本文将两轴驱动频率的最大公约数用作时间分辨率，用填充因子（FF）的概念来描述扫描仪的空间分辨率，并提出了一种计算FF的通用算法。结合李萨如轨迹的特点，提出了通用李萨如扫描仪的三条设计规则，完善了实现MEMS激光雷达的李萨如扫描仪的设计理论。实验结果表明，所提出的设计规则能够有效满足激光雷达的设计要求。
