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用于微操作的具有三级放大机构的微夹钳的设计与分析

Design and Analysis of a Microgripper with Three-Stage Amplification Mechanism for Micromanipulation.

作者信息

Hong Yuan, Wu Yimin, Jin Shichao, Liu Dayong, Chi Baihong

机构信息

Space Star Technology Co., Ltd., Beijing 100086, China.

出版信息

Micromachines (Basel). 2022 Feb 25;13(3):366. doi: 10.3390/mi13030366.

DOI:10.3390/mi13030366
PMID:35334658
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8953843/
Abstract

This paper proposes a novel microgripper with two working modes. The microgripper is designed with symmetric structure and each part is actuated by one piezoelectric actuator, respectively. To achieve desired output displacement, each part of the microgripper is designed with three-stage amplification mechanism to amplify the displacement of the PZT actuator. According to the size of the microobjects, the grasping operation can be completed by one finger moving or two fingers moving simultaneously. Then, the theoretical analysis is carried out to calculated the key characteristics, including amplification, input stiffness and frequency. Finite element analysis (FEA) is conducted to optimize the structural parameters and investigate the performance of the microgripper. Finally, a prototype is machined by wire electro-discharge machining (WEDM) method and experiments are carried out to verify the performance of the microgripper. The results indicate that the amplification is 10.41 and the motion stroke of one jaw is 118.34 µm when the input voltage is 100 V. The first natural frequency is 746.56 Hz. By picking and placing the wires with different diameters and slices with different thickness, the grasping stability is verified.

摘要

本文提出了一种具有两种工作模式的新型微夹钳。该微夹钳采用对称结构设计,各部分分别由一个压电致动器驱动。为了实现所需的输出位移,微夹钳的各部分采用三级放大机构来放大压电致动器的位移。根据微物体的尺寸,抓取操作可以通过一个手指移动或两个手指同时移动来完成。然后,进行理论分析以计算关键特性,包括放大倍数、输入刚度和频率。进行有限元分析(FEA)以优化结构参数并研究微夹钳的性能。最后,通过电火花线切割加工(WEDM)方法加工出一个原型,并进行实验以验证微夹钳的性能。结果表明,当输入电压为100 V时,放大倍数为10.41,一个钳口的运动行程为118.34 µm。第一固有频率为746.56 Hz。通过拾取和放置不同直径的导线以及不同厚度的薄片,验证了抓取稳定性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/25db5179ae3c/micromachines-13-00366-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/afe3ebbea2b6/micromachines-13-00366-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/6d220c4a2ae7/micromachines-13-00366-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/4fd377037090/micromachines-13-00366-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/9eeda3b13b1f/micromachines-13-00366-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/4d9ef56ba226/micromachines-13-00366-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/a9ab7943bc58/micromachines-13-00366-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/4db99a6b213e/micromachines-13-00366-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/72ed8b8337b8/micromachines-13-00366-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/f3c9f2710d0a/micromachines-13-00366-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/88b7b0180913/micromachines-13-00366-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/25db5179ae3c/micromachines-13-00366-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/afe3ebbea2b6/micromachines-13-00366-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/6d220c4a2ae7/micromachines-13-00366-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/4fd377037090/micromachines-13-00366-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/9eeda3b13b1f/micromachines-13-00366-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/4d9ef56ba226/micromachines-13-00366-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/a9ab7943bc58/micromachines-13-00366-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/4db99a6b213e/micromachines-13-00366-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/72ed8b8337b8/micromachines-13-00366-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/f3c9f2710d0a/micromachines-13-00366-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/88b7b0180913/micromachines-13-00366-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfa0/8953843/25db5179ae3c/micromachines-13-00366-g011.jpg

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本文引用的文献

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Design of a Novel MEMS Microgripper with Rotatory Electrostatic Comb-Drive Actuators for Biomedical Applications.用于生物医学应用的新型旋转静电梳齿驱动微夹的设计。
Sensors (Basel). 2018 May 22;18(5):1664. doi: 10.3390/s18051664.
2
A novel flexure-based microgripper with double amplification mechanisms for micro/nano manipulation.一种用于微纳操作的具有双放大机制的新型基于挠曲的微夹钳。
Rev Sci Instrum. 2013 Aug;84(8):085002. doi: 10.1063/1.4817695.
3
Manipulation of biological samples using micro and nano techniques.使用微纳技术对生物样本进行操作。
Integr Biol (Camb). 2009 Jan;1(1):30-42. doi: 10.1039/b814549k. Epub 2008 Nov 12.