Wang Chenggang, Hao Yongcun, Sun Zheng, Zu Luhan, Yuan Weizheng, Chang Honglong
Ningbo Institute of Northwestern Polytechnical University, Ningbo 315103, China.
MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an 710072, China.
Micromachines (Basel). 2022 Mar 17;13(3):459. doi: 10.3390/mi13030459.
Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer. The experiments show that the stiffness of the accelerometer is reduced by 43% with softened beams and the sensitivity is increased by 72.6%. As a result, the noise of the accelerometer is reduced to 26.2 μg/√Hz with an improvement of 44.5%, and bias instability is reduced to 5.05 μg with an enhancement of 38.7%. The electrostatic assembly-based stiffness softening technique is proven to be effective and can be used in many types of MEMS devices.
较低的刚度可以提高基于电容式的微机电系统传感器的性能。本文提出了通过静电组装方法实现的软化梁，以降低电容式微机电系统加速度计的刚度。实验表明，采用软化梁后，加速度计的刚度降低了43%，灵敏度提高了72.6%。结果，加速度计的噪声降低到26.2 μg/√Hz，改善了44.5%，偏置不稳定性降低到5.05 μg，提高了38.7%。基于静电组装的刚度软化技术被证明是有效的，可用于多种类型的微机电系统器件。
