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用于重力测量应用的微机电系统加速度计的新型电容式传感系统设计

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications.

作者信息

Li Zhu, Wu Wen Jie, Zheng Pan Pan, Liu Jin Quan, Fan Ji, Tu Liang Cheng

机构信息

MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China.

Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China.

出版信息

Micromachines (Basel). 2016 Sep 14;7(9):167. doi: 10.3390/mi7090167.

DOI:10.3390/mi7090167
PMID:30404340
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6190280/
Abstract

This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In order to achieve a large dynamic range with an ultrahigh resolution, the capacitive detection system employs two periodic-sensing-array transducers. Each of them can provide numbers for the signal period in the entire operating range. The suspended proof-mass is encapsulated between two glass caps, which results in a three dimensional structure. The measured resonant frequency and quality factor () are 13.2 Hz and 47, respectively. The calibration response of a ±0.7 g input acceleration is presented, and the accelerometer system presents a sensitivity of 122 V/g and a noise floor of 30 ng/√Hz (at 1 Hz, and 1 atm). The bias stability for a period of 10 h is 30 μg. The device has endured a shock up to ±2.6 g, and the full scale output appears to be approximately ±1.4 g presently. This work presents a new opportunity for highly sensitive MEMS fabrication to enable future high-precision measurement applications, such as for gravity measurements.

摘要

本文介绍了一种面内三明治式纳米 - 微机电系统（MEMS）加速度计。检测质量的制造基于使用电感耦合等离子体（ICP）蚀刻的硅蚀刻穿透技术。电容检测系统采用面积变化传感方法，将基本电容拾取电极与周期性传感阵列换能器相结合。为了在超高分辨率下实现大动态范围，电容检测系统采用了两个周期性传感阵列换能器。它们中的每一个都可以在整个工作范围内为信号周期提供数值。悬浮的检测质量被封装在两个玻璃盖之间，从而形成三维结构。测得的谐振频率和品质因数（）分别为13.2 Hz和47。给出了±0.7 g输入加速度的校准响应，加速度计系统的灵敏度为122 V/g，本底噪声为30 ng/√Hz（在1 Hz和1个大气压下）。10小时的偏置稳定性为30 μg。该器件经受住了高达±2.6 g的冲击，目前满量程输出似乎约为±1.4 g。这项工作为高灵敏度MEMS制造提供了新机会，以实现未来的高精度测量应用，例如重力测量。

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Rev Sci Instrum. 2014 Sep;85(9):095108. doi: 10.1063/1.4895647.
3
Resonant frequency detection and adjustment method for a capacitive transducer with differential transformer bridge.具有差动变压器电桥的电容式传感器的谐振频率检测与调整方法。
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4
High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout.结合大位移屈曲行为与集成电容式读出的高分辨率微机电系统惯性传感器。
Microsyst Nanoeng. 2019 Dec 16;5:60. doi: 10.1038/s41378-019-0105-y. eCollection 2019.
5
Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review.微机械加速度计，具有亚微克/√赫兹噪声底：综述。
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6
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8
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4
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Rev Sci Instrum. 2012 Sep;83(9):095002. doi: 10.1063/1.4749845.
5
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6
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