Li Enfu, Jian Jiaying
School of Engineering, Huzhou University, Huzhou 313000, China.
School of Electronic Information and Engineering, Xi'an Technological University, Xi'an 710021, China.
Micromachines (Basel). 2024 May 9;15(5):635. doi: 10.3390/mi15050635.
A top-down design methodology and implementation of a time domain sensor is presented in this paper. The acceleration resolution of the time domain sensor is equal to the time-measurement accuracy divided by the sensor sensitivity. Combined with the sensitivity formula, the acceleration resolution is proportional to the vibration amplitude, the time-measurement accuracy, and the third power of the resonant frequency. According to the available time-measurement accuracy and the desired acceleration resolution, the parameters including the vibration amplitude and the resonant frequency were theoretically calculated. The geometrical configuration of the time domain sensor device was designed based on the calculated parameters. Then, the designed device was fabricated based on a standard silicon-on-insulator process and a matched interface circuit was developed for the fabricated device. Experimental results demonstrated that the design methodology is effective and feasible. Moreover, the implemented sensor works well. In addition, the acceleration resolution can be tuned by adjusting the time-measurement accuracy and the vibration amplitude. All the reported results of this work can be expanded to other time domain inertial sensors, e.g., a gyroscope or tilt sensor.
本文提出了一种时域传感器的自上而下设计方法及实现。时域传感器的加速度分辨率等于时间测量精度除以传感器灵敏度。结合灵敏度公式，加速度分辨率与振动幅度、时间测量精度以及共振频率的三次方成正比。根据可用的时间测量精度和期望的加速度分辨率，从理论上计算了包括振动幅度和共振频率在内的参数。基于计算出的参数设计了时域传感器装置的几何结构。然后，基于标准绝缘体上硅工艺制造了所设计的装置，并为制造的装置开发了匹配的接口电路。实验结果表明该设计方法有效可行。此外，所实现的传感器工作良好。另外，可通过调整时间测量精度和振动幅度来调节加速度分辨率。这项工作所报道的所有结果均可扩展到其他时域惯性传感器，例如陀螺仪或倾斜传感器。
