Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, People's Republic of China.
Earth-Life Science Institute, Tokyo Institute of Technology, Meguro-ku, Tokyo 152-8550, Japan.
Nanotechnology. 2022 Apr 20;33(27). doi: 10.1088/1361-6528/ac622b.
Nanopores are valuable single-molecule sensing tools that have been widely applied to the detection of DNA, RNA, proteins, viruses, glycans, etc. The prominent sensing platform is helping to improve our health-related quality of life and accelerate the rapid realization of precision medicine. Solid-state nanopores have made rapid progress in the past decades due to their flexible size, structure and compatibility with semiconductor fabrication processes. With the development of semiconductor fabrication techniques, materials science and surface chemistry, nanopore preparation and modification technologies have made great breakthroughs. To date, various solid-state nanopore materials, processing technologies, and modification methods are available to us. In the review, we outline the recent advances in nanopores fabrication and analyze the virtues and limitations of various membrane materials and nanopores drilling techniques.
纳米孔是有价值的单分子传感工具，已广泛应用于 DNA、RNA、蛋白质、病毒、聚糖等的检测。这种突出的传感平台有助于提高我们的与健康相关的生活质量，并加速精准医疗的快速实现。由于其尺寸、结构灵活，与半导体制造工艺兼容，固态纳米孔在过去几十年中取得了快速发展。随着半导体制造技术、材料科学和表面化学的发展，纳米孔的制备和修饰技术取得了重大突破。迄今为止，我们拥有各种固态纳米孔材料、加工技术和修饰方法。在这篇综述中，我们概述了纳米孔制造的最新进展，并分析了各种膜材料和纳米孔钻孔技术的优点和局限性。
