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形状记忆聚合物多层薄膜的接触印刷

Contact Printing of Multilayered Thin Films with Shape Memory Polymers.

作者信息

Kim Soyoun, Liu Nan, Shestopalov Alexander A

机构信息

Department of Chemical Engineering, University of Rochester, Rochester, New York 14625, United States.

出版信息

ACS Nano. 2022 Apr 26;16(4):6134-6144. doi: 10.1021/acsnano.1c11607. Epub 2022 Mar 30.

DOI:10.1021/acsnano.1c11607
PMID:35353499
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9047662/
Abstract

This study describes a method for transfer printing microarrays of multilayered organic-inorganic thin films using shape memory printing stamps and microstructured donor substrates. By applying the films on the microstructured donor substrates during physical vapor deposition and modulating the interfacial adhesion using a shape memory elastomer during printing, this method achieves (1) high lateral and feature-edge resolution and (2) high transfer efficiency from the donor to the receiver substrate. For demonstration, polyurethane-acrylate stamps and silicon/silicon oxide donor substrates were used in the large-area transfer printing of organic-inorganic thin-film stacks with micrometer lateral dimensions and sub-200 nm thickness.

摘要

本研究描述了一种使用形状记忆印刷印章和微结构化供体基板转移印刷多层有机-无机薄膜微阵列的方法。通过在物理气相沉积过程中将薄膜施加到微结构化供体基板上，并在印刷过程中使用形状记忆弹性体调节界面附着力，该方法实现了：（1）高横向分辨率和特征边缘分辨率；（2）从供体基板到受体基板的高转移效率。为了进行演示，聚氨酯丙烯酸酯印章和硅/氧化硅供体基板被用于大面积转移印刷横向尺寸为微米级且厚度小于200纳米的有机-无机薄膜堆叠。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/176409219cba/nn1c11607_0011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/262889b6cb87/nn1c11607_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/5be8488bdc12/nn1c11607_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/dee22cd7c94b/nn1c11607_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/b32071793aab/nn1c11607_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/2bef5de6539b/nn1c11607_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/fca77e1b6d17/nn1c11607_0006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/858e7c83490a/nn1c11607_0007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/825dc0c1c1f0/nn1c11607_0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/9eca0ec5f197/nn1c11607_0009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/aa485c1ca580/nn1c11607_0010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/176409219cba/nn1c11607_0011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/262889b6cb87/nn1c11607_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/5be8488bdc12/nn1c11607_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/dee22cd7c94b/nn1c11607_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/b32071793aab/nn1c11607_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/2bef5de6539b/nn1c11607_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/fca77e1b6d17/nn1c11607_0006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/858e7c83490a/nn1c11607_0007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/825dc0c1c1f0/nn1c11607_0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/9eca0ec5f197/nn1c11607_0009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/aa485c1ca580/nn1c11607_0010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f10a/9047662/176409219cba/nn1c11607_0011.jpg

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