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用于纳米光子学的薄膜嵌段共聚物自组装

Thin film block copolymer self-assembly for nanophotonics.

作者信息

Kulkarni Ashish A, Doerk Gregory S

机构信息

Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, United States of America.

出版信息

Nanotechnology. 2022 Apr 29;33(29). doi: 10.1088/1361-6528/ac6315.

Abstract

The nanophotonic engineering of light-matter interactions has profoundly changed research behind the design and fabrication of optical materials and devices. Metasurfaces-arrays of subwavelength nanostructures that interact resonantly with electromagnetic radiation-have emerged as an integral nanophotonic platform for a new generation of ultrathin lenses, displays, polarizers and other devices. Their success hinges on advances in lithography and nanofabrication in recent decades. While existing nanolithography techniques are suitable for basic research and prototyping, issues of cost, throughput, scalability, and substrate compatibility may preclude their use for many metasurface applications. Patterning via spontaneous self-assembly of block copolymer thin films offers an enticing alternative for nanophotonic manufacturing that is rapid, inexpensive, and applicable to large areas and diverse substrates. This review discusses the advantages and disadvantages of block copolymer-based nanopatterning and highlights recent progress in their use for broadband antireflection, surface enhanced Raman spectroscopy, and other nanophotonic applications. Recent advances in diversification of self-assembled block copolymer nanopatterns and improved processes for enhanced scalability of self-assembled nanopatterning using block copolymers are also discussed, with a spotlight on directions for future research that would enable a wider array of nanophotonic applications.

摘要

光与物质相互作用的纳米光子工程深刻改变了光学材料和器件设计与制造背后的研究。超表面——与电磁辐射发生共振相互作用的亚波长纳米结构阵列——已成为用于新一代超薄透镜、显示器、偏振器及其他器件的不可或缺的纳米光子平台。它们的成功取决于近几十年来光刻和纳米制造技术的进步。虽然现有的纳米光刻技术适用于基础研究和原型制作,但成本、产量、可扩展性和衬底兼容性等问题可能会妨碍其在许多超表面应用中的使用。通过嵌段共聚物薄膜的自发自组装进行图案化,为纳米光子制造提供了一种诱人的替代方案,这种方法快速、廉价,适用于大面积和多种衬底。本文综述了基于嵌段共聚物的纳米图案化的优缺点,并重点介绍了其在宽带抗反射、表面增强拉曼光谱及其他纳米光子应用中的最新进展。还讨论了自组装嵌段共聚物纳米图案多样化的最新进展以及使用嵌段共聚物提高自组装纳米图案化可扩展性的改进工艺,并着重介绍了未来研究方向,这些方向将实现更广泛的纳米光子应用。

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