Lei Cheng, Zhang Junna, Liang Ting, Liu Ruifang, Zhao Zhujie, Xiong Jijun, Yin Kai
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
State Key Laboratory of Bioelectronics, Southeast University, Nanjing 210096, China.
Micromachines (Basel). 2022 Mar 24;13(4):504. doi: 10.3390/mi13040504.
Based on the humidity testing requirements in different environments, this paper investigates the humidity sensitivity of reduced graphene oxide (rGO)-sodium dodecyl sulfate (SDS) composite film humidity sensor. In the experiments, rGO-SDS dispersions with a concentration of 5 mg/mL were prepared, and a microelectromechanical system (MEMS) process was used to prepare the interdigital electrodes. The dispersions were then drop-coated on the interdigital electrodes and dried on a heated plate at 100 °C. The surface characteristics of the rGO-SDS films transferred onto SiO-Si substrates were analyzed by scanning electron microscopy, raman spectroscopy and atomic force microscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, and tested by a correlation system, which showed a linear relationship between humidity variation and the resistance variation of the sensor in the ambient humidity range of 25-95% RH. At room temperature, the linearity of the sensor is about 0.98431 and the sensitivity is about 11.41432 Ω/% RH. At 100 °C, the correlation of the sensor is about 0.95046 and the sensitivity is about 1.0145 Ω/% RH; with a response time of only 9 s at ambient humidity from 25% RH to 95% RH, the sensor has very good repeatability and stability.
基于不同环境下的湿度测试要求,本文研究了还原氧化石墨烯(rGO)-十二烷基硫酸钠(SDS)复合薄膜湿度传感器的湿度敏感性。实验中,制备了浓度为5mg/mL的rGO-SDS分散液,并采用微机电系统(MEMS)工艺制备叉指电极。然后将分散液滴涂在叉指电极上,并在100℃的加热板上干燥。通过扫描电子显微镜、拉曼光谱、原子力显微镜、红外光谱、X射线光电子能谱对转移到SiO-Si衬底上的rGO-SDS薄膜的表面特性进行了分析,并通过相关系统进行了测试,结果表明在25-95%RH的环境湿度范围内,湿度变化与传感器电阻变化之间呈线性关系。在室温下,传感器的线性度约为0.98431,灵敏度约为11.41432Ω/%RH。在100℃时,传感器的相关性约为0.95046,灵敏度约为1.0145Ω/%RH;在环境湿度从25%RH到95%RH时响应时间仅为9s,该传感器具有非常好的重复性和稳定性。