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通过振动模式优化提高压电微机械超声换能器的传输性能

Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization.

作者信息

Li Penglu, Fan Zheng, Duan Xiaoya, Cui Danfeng, Zang Junbin, Zhang Zengxing, Xue Chenyang

机构信息

Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2022 Apr 10;13(4):596. doi: 10.3390/mi13040596.

DOI:10.3390/mi13040596
PMID:35457901
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9028921/
Abstract

Ultrasound is widely used in industry and the agricultural, biomedical, military, and other fields. As key components in ultrasonic applications, the characteristic parameters of ultrasonic transducers fundamentally determine the performance of ultrasonic systems. High-frequency ultrasonic transducers are small in size and require high precision, which puts forward higher requirements for sensor design, material selection, and processing methods. In this paper, a three-dimensional model of a high-frequency piezoelectric micromachined ultrasonic transducer (PMUT) is established based on the finite element method (FEM). This 3D model consists of a substrate, a silicon device layer, and a molybdenum-aluminum nitride-molybdenum (Mo-AlN-Mo) sandwich piezoelectric layer. The effect of the shape of the transducer's vibrating membrane on the transmission performance was studied. Through a discussion of the parametric scanning of the key dimensions of the diaphragms of the three structures, it was concluded that the fundamental resonance frequency of the hexagonal diaphragm was higher than that of the circle and the square under the same size. Compared with the circular diaphragm, the sensitivity of the square diaphragm increased by 8.5%, and the sensitivity of the hexagonal diaphragm increased by 10.7%. The maximum emission sound-pressure level of the hexagonal diaphragm was 6.6 times higher than that of the circular diaphragm. The finite element results show that the hexagonal diaphragm design has great advantages for improving the transmission performance of the high-frequency PMUT.

摘要

超声广泛应用于工业以及农业、生物医学、军事等领域。作为超声应用中的关键部件，超声换能器的特性参数从根本上决定了超声系统的性能。高频超声换能器尺寸小且要求精度高，这对传感器设计、材料选择和加工方法提出了更高要求。本文基于有限元方法（FEM）建立了高频压电微机械超声换能器（PMUT）的三维模型。该三维模型由衬底、硅器件层和钼 - 氮化铝 - 钼（Mo - AlN - Mo）夹心压电层组成。研究了换能器振动膜形状对传输性能的影响。通过对三种结构膜片关键尺寸的参数扫描讨论得出，在相同尺寸下，六边形膜片的基频共振频率高于圆形和方形膜片。与圆形膜片相比，方形膜片的灵敏度提高了8.5%，六边形膜片的灵敏度提高了10.7%。六边形膜片的最大发射声压级比圆形膜片高6.6倍。有限元结果表明，六边形膜片设计对于提高高频PMUT的传输性能具有很大优势。

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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/47cc/9028921/fac2fc2fd063/micromachines-13-00596-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/47cc/9028921/2000cca6e2d7/micromachines-13-00596-g017.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/47cc/9028921/e47a7bf5488a/micromachines-13-00596-g020.jpg

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