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一种基于石墨烯纳米机械谐振器的高灵敏度共振磁传感器。

A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator.

作者信息

Liu Wenyao, Li Wei, Liu Chenxi, Xing Enbo, Zhou Yanru, Liu Lai, Tang Jun

机构信息

Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, China.

State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2022 Apr 16;13(4):628. doi: 10.3390/mi13040628.

DOI:10.3390/mi13040628
PMID:35457932
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9032286/
Abstract

This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO substrate and Fe-Ga alloy, respectively. In this device, the deformation of the Fe-Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the -axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO substrate and the Fe-Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors.

摘要

本文介绍了一种新型的谐振磁传感器，该传感器由石墨烯纳米机械振荡器和磁致伸缩应力耦合结构组成，分别采用Si/SiO衬底和Fe-Ga合金。在该器件中，外部磁场导致Fe-Ga合金变形，从而改变了石墨烯的表面张力，导致石墨烯的共振频率发生显著变化。通过有限元分析发现，在1至1.6 mT的范围内，共振频率的响应与外部磁场（沿z轴）呈现出良好的线性关系。通过优化磁传感器各组件的尺寸，如Si/SiO衬底和Fe-Ga合金的厚度以及石墨烯的长度，灵敏度甚至可达到834 kHz/mT，比传统的谐振磁器件高出三个数量级。这为高灵敏度和小型化磁传感器提供了一种新方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/3cb2d683889d/micromachines-13-00628-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/b9ae82650daa/micromachines-13-00628-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/415d79656103/micromachines-13-00628-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/5a2f4769a6bd/micromachines-13-00628-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/918ac4d19524/micromachines-13-00628-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/3922fb85a2df/micromachines-13-00628-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/1ea5b2450491/micromachines-13-00628-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/5fdc406ddbd3/micromachines-13-00628-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/3cb2d683889d/micromachines-13-00628-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/b9ae82650daa/micromachines-13-00628-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/415d79656103/micromachines-13-00628-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/5a2f4769a6bd/micromachines-13-00628-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/918ac4d19524/micromachines-13-00628-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/3922fb85a2df/micromachines-13-00628-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/1ea5b2450491/micromachines-13-00628-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/5fdc406ddbd3/micromachines-13-00628-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e63/9032286/3cb2d683889d/micromachines-13-00628-g008.jpg

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本文引用的文献

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