Laboratory of Atomic and Solid State Physics.
Nano Lett. 2010 Dec 8;10(12):4869-73. doi: 10.1021/nl102713c. Epub 2010 Nov 16.
We fabricated large arrays of suspended, single-layer graphene membrane resonators using chemical vapor deposition (CVD) growth followed by patterning and transfer. We measure the resonators using both optical and electrical actuation and detection techniques. We find that the resonators can be modeled as flat membranes under tension, and that clamping the membranes on all sides improves agreement with our model and reduces the variation in frequency between identical resonators. The resonance frequency is tunable with both electrostatic gate voltage and temperature, and quality factors improve dramatically with cooling, reaching values up to 9000 at 10 K. These measurements show that it is possible to produce large arrays of CVD-grown graphene resonators with reproducible properties and the same excellent electrical and mechanical properties previously reported for exfoliated graphene.
我们使用化学气相沉积 (CVD) 生长法制造了大面积悬空单层石墨烯膜谐振器，并通过图案化和转移工艺实现了这一过程。我们采用光学和电学激励与探测技术来测量这些谐振器。我们发现，在张力作用下，这些谐振器可以被建模为平面膜，而在所有侧面夹持这些膜可以提高我们的模型拟合度，并减少相同谐振器之间的频率变化。通过静电门电压和温度，谐振器的共振频率可以进行调节，冷却可以极大地提高品质因数，在 10 K 时可达到 9000 的数值。这些测量结果表明，我们可以用重复性好的方法，来制造大面积的 CVD 生长石墨烯谐振器阵列，而其电学和机械性能与之前报道的剥离石墨烯相同。
