Bae Eun-Jeong, Kang Shin-Woo, Choi Geun-Su, Jang Eun-Bi, Baek Dong-Hyun, Ju Byeong-Kwon, Park Young-Wook
Nano and Organic-Electronics Laboratory, Department of Display and Semiconductor Engineering, Sun Moon University, Asan 31460, Korea.
Display and Nanosystem Laboratory, Department of Electrical Engineering, Korea University, Seoul 02841, Korea.
Nanomaterials (Basel). 2022 Apr 8;12(8):1266. doi: 10.3390/nano12081266.
In this study, an external light extraction layer with a micro-nano hybrid structure was applied to improve the external light extraction efficiency of organic light-emitting diodes (OLEDs). A reactive ion-etching (RIE) process, using O and CHF plasma, was performed on the surface of the micro-scale pattern to form micro-nano hybrid structures. According to the results of this study, the nanostructures formed by the treatment of O and CHF were different, and the efficiency according to the structures was analyzed experimentally and theoretically. As a result, the OLED, to which the micro-nano hybrid structure, manufactured through a simple process, is applied, improved the external light extraction efficiency by up to 38%, and an extended viewing angle profile was obtained. Additionally, an effective method for enhancing the out-coupling efficiency of OLEDs was presented by optimizing the micro-nano hybrid structure according to process conditions.
在本研究中，采用具有微纳混合结构的外部光提取层来提高有机发光二极管（OLED）的外部光提取效率。使用O和CHF等离子体的反应离子蚀刻（RIE）工艺在微尺度图案表面进行处理，以形成微纳混合结构。根据本研究结果，O和CHF处理形成的纳米结构不同，并对不同结构的效率进行了实验和理论分析。结果表明，通过简单工艺制造的微纳混合结构应用于OLED后，外部光提取效率提高了38%，并获得了扩展的视角分布。此外，通过根据工艺条件优化微纳混合结构，提出了一种提高OLED外耦合效率的有效方法。
