State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; Shanghai Institute of Technology, Shanghai 201418, China.
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
J Chromatogr A. 2022 Jun 21;1673:463082. doi: 10.1016/j.chroma.2022.463082. Epub 2022 Apr 21.
In this paper, a micro gas chromatographic column (μGCC) was fabricated via the layer-by-layer (LBL) deposition of mesoporous silica (MS) as the stationary phase. The μGCC with embedded elliptical-cylindrical posts was fabricated by typical micro-electro-mechanical system (MEMS) techniques. The MS powder was prepared by a sol-gel method and then deposited inside the microchannels of the μGCC by LBL deposition. This process avoided the high temperature required for the sol-gel method to directly prepare MS inside the microchannel surfaces of the μGCC. Mixtures of light alkanes (C1-C4) could be separated in the μGCC. The separation results showed that the resolution between the components of the sample increased with the number of deposition cycles. When the number of deposition cycles increased from 1 to 8, the resolution of methane and ethane was increased from unseparated to 5.89.
本文通过层层（LBL）沉积介孔二氧化硅（MS）作为固定相，制备了微气相色谱柱（μGCC）。采用典型的微电子机械系统（MEMS）技术，制备了嵌入椭圆形柱状物的μGCC。MS 粉末通过溶胶-凝胶法制备，然后通过 LBL 沉积在μGCC 的微通道内沉积。该过程避免了溶胶-凝胶法直接在μGCC 的微通道表面制备 MS 所需的高温。在μGCC 中可以分离轻烷烃（C1-C4）混合物。分离结果表明，样品组分之间的分辨率随沉积循环次数的增加而增加。当沉积循环次数从 1 增加到 8 时，甲烷和乙烷的分辨率从未分离增加到 5.89。
