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用于高性能非制冷中红外PbSe探测器的改进型气相沉积技术

Modified vapor phase deposition technology for high-performance uncooled MIR PbSe detectors.

作者信息

Qiu Jijun, Liu Yun, Zhang Guodong, Shi Kanghao, Li Yanzhen, Luo Yingmin

机构信息

School of Microelectronics, Dalian University of Technology Dalian 116024 PR China

出版信息

RSC Adv. 2021 Oct 28;11(55):34908-34914. doi: 10.1039/d1ra06144e. eCollection 2021 Oct 25.

Abstract

The low performance of middle infrared (MIR) PbSe detectors fabricated from vapor phase deposition (VPD) technology restricts the rapid development of VPD technology and detector commercialization. A modified VPD process was proposed to duplicate the microstructural features of high-performance CBD-PbSe detectors for a breakthrough in the VPD technology. A peak detectivity * of 1.6 × 10 cm Hz W at 298 K was achieved under the optimized sensitization, approaching the best performance of CBD-PbSe detectors. Through the contrasting various microstructures obtained from diverse methods, the nanoparticle self-assembly structure in VPD-PbSe oriented rod-like crystals is an important factor for the IR sensitivity. The microstructural evolution demonstrated that there is a large space to grow for VPD-PbSe detectivity * eliminating the voids formed in the iodine-sensitization process. The increased performance indicates that the modified VPD technology can provide technical support for the manufacturing of the megapixel uncooled lead-salt FPA imager and accelerate its industrialization.

摘要

采用气相沉积(VPD)技术制造的中红外(MIR)PbSe探测器性能不佳,限制了VPD技术的快速发展和探测器的商业化。为了在VPD技术上取得突破,提出了一种改进的VPD工艺,以复制高性能化学浴沉积(CBD)-PbSe探测器的微观结构特征。在优化敏化条件下,在298 K时实现了1.6×10 cm Hz W的峰值探测率*,接近CBD-PbSe探测器的最佳性能。通过对比不同方法获得的各种微观结构,VPD-PbSe取向棒状晶体中的纳米颗粒自组装结构是影响红外灵敏度的重要因素。微观结构演变表明,VPD-PbSe探测率*有很大的提升空间,消除了碘敏化过程中形成的空隙。性能的提高表明,改进的VPD技术可为百万像素非制冷铅盐焦平面阵列(FPA)成像器的制造提供技术支持,并加速其产业化。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cf41/9042917/20f22527452e/d1ra06144e-f1.jpg

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