Han Chengzhang, Wang Xia, Zhao Qiuling, Teng Lihua, Zhang Shuaiyi, Lv Hao, Liu Jing, Ma Haoran, Wang Yanping
Optoelectronic Materials and Technologies Engineering Laboratory, Shandong, Physics Department, Qingdao University of Science and Technology Qingdao 266042 China
College of Mechanical and Electronic Engineering, Qingdao Binhai University Qingdao 266555 China.
RSC Adv. 2019 Jul 9;9(37):21323-21328. doi: 10.1039/c9ra01695c. eCollection 2019 Jul 5.
We report the fabrication of a solidly mounted resonator (SMR) that can also function as a sensor for biological molecules. The SMR, consisting of a Au electrode, aluminum nitride (AlN) piezoelectric thin film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering. The Bragg acoustic reflector, made entirely of metal, has small internal stress and good heat conduction. Human immunoglobulin G (IgG) antibody was immobilized on the modified (by self-assembled monolayer method) Au electrode surface of the SMR and goat anti-human IgG antigen was captured through the specificity of bond between the antibody and antigen on the electrode surface. We found a linear relationship between the resonant frequency shift and the concentration of goat anti-human IgG antigen for concentrations smaller than 0.4 mg ml and a relatively constant frequency shift for concentrations greater than 0.5 mg ml. A series of interference experiments can prove that the selectivity of the sensor is satisfactory. Our findings suggest that the SMR sensor is an attractive alternative for biomolecule detection.
我们报道了一种能够用作生物分子传感器的固态安装谐振器（SMR）的制造方法。该SMR由金电极、氮化铝（AlN）压电薄膜和布拉格声反射器组成，通过射频（RF）磁控溅射在硅衬底上制造而成。完全由金属制成的布拉格声反射器具有较小的内部应力和良好的热传导性。将人免疫球蛋白G（IgG）抗体固定在经过修饰（采用自组装单层方法）的SMR金电极表面，通过电极表面抗体与抗原之间的特异性结合捕获山羊抗人IgG抗原。我们发现，当山羊抗人IgG抗原浓度小于0.4 mg/ml时，共振频率偏移与浓度之间呈线性关系；当浓度大于0.5 mg/ml时，频率偏移相对恒定。一系列干扰实验能够证明该传感器的选择性令人满意。我们的研究结果表明，SMR传感器是生物分子检测的一种有吸引力的替代方案。
