Carmona-Cejas José Manuel, Mirea Teona, Hervás-García Ricardo, Olivares Jimena, Clement Marta
CEMDATIC-ETSI Telecomunicación, Universidad Politécnica de Madrid, 28040 Madrid, Spain.
Sensors (Basel). 2024 Apr 30;24(9):2877. doi: 10.3390/s24092877.
Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications. However, they can suffer from cross-sensitivity issues, as their response can be altered by undesirable ambient factors, such as temperature and humidity variations. In this work we propose a method to discriminate humidity variations from the general frequency response using an SMR specifically manufactured to operate in a dual-mode (displaying two close resonances). The two modes behave similarly towards humidity changes (-1.94 kHZ/(%RH)) for resonance one and -1.62 kHZ/(%RH) for resonance two), whereas their performance under temperature changes is significantly different, displaying 2.64 kHZ/°C for resonance one and 34.21 kHZ/°C for resonance two. This allows for the decoupling process to be carried out in a straightforward manner. Frequency response is tracked under different humidity conditions, in the -20 °C to room temperature region, proving that this behavior is reproducible in any given environment.
基于固态安装谐振器（SMR）的传感器具有一系列优良特性，如高灵敏度、快速响应、低分辨率极限和低成本，这使其成为传感应用中颇具吸引力的技术。然而，它们可能会受到交叉敏感问题的影响，因为其响应可能会因温度和湿度变化等不良环境因素而改变。在这项工作中，我们提出了一种方法，使用专门制造的可在双模式下工作（显示两个相近的共振频率）的SMR，从一般频率响应中区分湿度变化。这两种模式对湿度变化的表现相似（共振频率一为-1.94 kHz/(%RH)，共振频率二为-1.62 kHz/(%RH)），而它们在温度变化下的性能则有显著差异，共振频率一为2.64 kHz/°C，共振频率二为34.21 kHz/°C。这使得解耦过程能够以直接的方式进行。在-20°C至室温范围内的不同湿度条件下跟踪频率响应，证明这种行为在任何给定环境中都是可重复的。
