Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany.
Sensors (Basel). 2010;10(5):4180-93. doi: 10.3390/s100504180. Epub 2010 Apr 27.
The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
吞吐量是无标记生物传感器的一个重要参数。石英晶体微天平等声波谐振器的吞吐量较低，因为同时使用的传感器数量有限。在这里，我们展示了一个由 64 个 CMOS 集成薄膜体声波谐振器组成的阵列。我们将其性能与表面等离子体共振和石英晶体微天平进行了比较，并展示了该传感器在多路 DNA 检测中的性能。
