Brandt Iuri S, Plá Cid Cristiani C, Azevedo Carlos G G, Pereira André L J, Benetti Luana C, Ferlauto Andre S, Dias da Silva José H, Pasa André A
Laboratório de Filmes Finos e Superfícies, Universidade Federal de Santa Catarina Florianópolis 88040-900 Brazil
Programa de Pós-Graduação em Ciência e Engenharia de Materiais, Universidade Federal de Santa Catarina Florianópolis 88040-900 Brazil.
RSC Adv. 2018 Feb 14;8(13):7062-7071. doi: 10.1039/c7ra10974a. eCollection 2018 Feb 9.
TiO films are grown on LaAlO (001), Si (100) and SiO substrates by reactive radio frequency sputtering. X-ray diffraction (XRD) pole figures revealed important characteristics about the texture and phase distribution on those films. Combined with spectroscopic ellipsometry, the pole figures allowed the analysis of the growth characteristics over the whole volume of the layers. Details in the microstructure of the films were probed using transmission electron spectroscopy. Anatase is the dominating phase in the films grown on all substrates. On TiO/LaAlO fims, the mosaicity is very low, so that the pole figure closely resembles that of anatase monocrystals. Detailed inspection of XRD pole figures reveals a small amount of rutile in the TiO/LaAlO films. For the growth of TiO onto SiO, rutile and brookite phases are also detected. Transmission electron microscopy and XRD results show the formation of anatase {112} twins in films grown on the different substrates, suggesting that the anatase {112} twin mediates the growth of rutile and brookite phases. Optical results are in agreement with the XRD observations: the optical properties of TiO/LaAlO films are similar to the ordinary values of bulk anatase crystals, indicating the orientation of the film in the [001] direction, whereas results for TiO/SiO are compatible with lower crystalline ordering.
通过反应性射频溅射在LaAlO(001)、Si(100)和SiO衬底上生长TiO薄膜。X射线衍射(XRD)极图揭示了这些薄膜的织构和相分布的重要特征。结合光谱椭偏仪，极图允许对整个层体积内的生长特性进行分析。使用透射电子能谱探测薄膜微观结构的细节。锐钛矿是在所有衬底上生长的薄膜中的主导相。在TiO/LaAlO薄膜上，镶嵌性非常低，因此极图与锐钛矿单晶的极图非常相似。对XRD极图的详细检查揭示了TiO/LaAlO薄膜中有少量金红石。对于在SiO上生长TiO，也检测到了金红石和板钛矿相。透射电子显微镜和XRD结果表明，在不同衬底上生长的薄膜中形成了锐钛矿{112}孪晶，这表明锐钛矿{112}孪晶介导了金红石和板钛矿相的生长。光学结果与XRD观察结果一致：TiO/LaAlO薄膜的光学性质与块状锐钛矿晶体的普通值相似，表明薄膜在[001]方向上的取向，而TiO/SiO的结果与较低的晶体有序性相符合。
