Department of Materials Science and Engineering and Research Institute of Advanced Materials (RIAM), Seoul National University , Seoul 151-744, Korea.
ACS Appl Mater Interfaces. 2014 Aug 13;6(15):11817-22. doi: 10.1021/am501656r. Epub 2014 Jul 22.
Epitaxial brookite TiO2 (B-TiO2) film was deposited on (110) yttria-stabilized zirconia (YSZ) substrate using plasma-enhanced atomic layer deposition, and its structural, optical, and gas sensing properties were investigated. As-deposited TiO2 film was a pure brookite and (120) oriented. The determined in-plane orientation relationships were [21̅0]B-TiO2//[1̅10]YSZ and [001]B-TiO2 //[001]YSZ. The B-TiO2 film showed ∼70% transmittance and the optical band gap energy was 3.29 eV. The B-TiO2 film-based gas sensor responded to H2 gas even at room temperature and the highest magnitude of the gas response was determined to be ∼150 toward 1000 ppm of H2/air at 150 °C. In addition, B-TiO2 sensor showed a high selectivity for H2 against CO, EtOH, and NH3.
采用等离子体增强原子层沉积法在（110）氧化钇稳定的氧化锆（YSZ）衬底上沉积了外延锐钛矿 TiO2（B-TiO2）薄膜，并研究了其结构、光学和气体传感性能。沉积的 TiO2 薄膜为纯锐钛矿且呈（120）取向。确定的面内取向关系为[21̅0]B-TiO2//[1̅10]YSZ 和 [001]B-TiO2 //[001]YSZ。B-TiO2 薄膜的透光率约为 70%，光学带隙能为 3.29 eV。基于 B-TiO2 薄膜的气体传感器即使在室温下也能对 H2 气体做出响应，在 150°C 时，对 1000 ppm H2/空气的最大气体响应约为 150。此外，B-TiO2 传感器对 H2 对 CO、EtOH 和 NH3 表现出高选择性。
