通过原子层沉积在 (110)YSZ 衬底上外延生长的锐钛矿 TiO2 薄膜。
Brookite TiO2 thin film epitaxially grown on (110) YSZ substrate by atomic layer deposition.
机构信息
Department of Materials Science and Engineering and Research Institute of Advanced Materials (RIAM), Seoul National University , Seoul 151-744, Korea.
出版信息
ACS Appl Mater Interfaces. 2014 Aug 13;6(15):11817-22. doi: 10.1021/am501656r. Epub 2014 Jul 22.
Epitaxial brookite TiO2 (B-TiO2) film was deposited on (110) yttria-stabilized zirconia (YSZ) substrate using plasma-enhanced atomic layer deposition, and its structural, optical, and gas sensing properties were investigated. As-deposited TiO2 film was a pure brookite and (120) oriented. The determined in-plane orientation relationships were [21̅0]B-TiO2//[1̅10]YSZ and [001]B-TiO2 //[001]YSZ. The B-TiO2 film showed ∼70% transmittance and the optical band gap energy was 3.29 eV. The B-TiO2 film-based gas sensor responded to H2 gas even at room temperature and the highest magnitude of the gas response was determined to be ∼150 toward 1000 ppm of H2/air at 150 °C. In addition, B-TiO2 sensor showed a high selectivity for H2 against CO, EtOH, and NH3.
采用等离子体增强原子层沉积法在（110）氧化钇稳定的氧化锆（YSZ）衬底上沉积了外延锐钛矿 TiO2（B-TiO2）薄膜，并研究了其结构、光学和气体传感性能。沉积的 TiO2 薄膜为纯锐钛矿且呈（120）取向。确定的面内取向关系为[21̅0]B-TiO2//[1̅10]YSZ 和 [001]B-TiO2 //[001]YSZ。B-TiO2 薄膜的透光率约为 70%，光学带隙能为 3.29 eV。基于 B-TiO2 薄膜的气体传感器即使在室温下也能对 H2 气体做出响应，在 150°C 时，对 1000 ppm H2/空气的最大气体响应约为 150。此外，B-TiO2 传感器对 H2 对 CO、EtOH 和 NH3 表现出高选择性。
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