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高χ-低嵌段聚合物:我们能走多远?

High χ-Low Block Polymers: How Far Can We Go?

作者信息

Sinturel Christophe, Bates Frank S, Hillmyer Marc A

机构信息

ICMN, UMR 7374 - CNRS/Université d'Orléans, 1b rue de la Férollerie, 45071 Orléans, France.

出版信息

ACS Macro Lett. 2015 Sep 15;4(9):1044-1050. doi: 10.1021/acsmacrolett.5b00472. Epub 2015 Sep 2.

Abstract

Block polymers incorporating highly incompatible segments are termed "high χ" polymers, where χ is the Flory-Huggins interaction parameter. These materials have attracted a great deal of interest because low molar mass versions allow for the formation of microphase-separated domains with very small (<10 nm) feature sizes useful for nanopatterning at these extreme dimensions. Given that well-established photolithographic techniques now face difficult challenges of implementation at scales of 10 nm and below, the drive to further develop high χ block polymers is motivated by trends in the microelectronics industry. This Viewpoint highlights our perspective on this niche of block polymer self-assembly. We first briefly review the relevant recent literature, exploring the various block polymer compositions that have been specifically designed for small feature size patterning. We then overview the now standard method for the benchmarking χ values between different pairs of polymers and the consequences of low and high χ on the thermodynamic aspects of microphase separation. Finally, we comment on restrictions going forward and offer our perspective on the future of this exciting area of block polymer self-assembly.

摘要

包含高度不相容链段的嵌段聚合物被称为“高χ”聚合物,其中χ是弗洛里 - 哈金斯相互作用参数。这些材料引起了极大的关注,因为低摩尔质量的版本能够形成具有非常小的(<10纳米)特征尺寸的微相分离域,这对于在这些极端尺寸下进行纳米图案化很有用。鉴于成熟的光刻技术目前在10纳米及以下尺度面临实施难题,微电子行业的发展趋势推动了对进一步开发高χ嵌段聚合物的需求。本观点文章突出了我们对嵌段聚合物自组装这一细分领域的看法。我们首先简要回顾相关近期文献,探讨专门为小特征尺寸图案化设计的各种嵌段聚合物组成。然后我们概述现在用于衡量不同聚合物对之间χ值的标准方法,以及低χ和高χ对微相分离热力学方面的影响。最后,我们评论未来的限制因素,并对嵌段聚合物自组装这个令人兴奋的领域的未来发表我们的看法。

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