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通过湿法和干法转移工艺转移的化学气相沉积生长石墨烯的表面性质

Surface Properties of CVD-Grown Graphene Transferred by Wet and Dry Transfer Processes.

作者信息

Yoon Min-Ah, Kim Chan, Kim Jae-Hyun, Lee Hak-Joo, Kim Kwang-Seop

机构信息

Division of Mechanical Engineering, University of Science & Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Korea.

Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials (KIMM), 156 Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea.

出版信息

Sensors (Basel). 2022 May 23;22(10):3944. doi: 10.3390/s22103944.

DOI:10.3390/s22103944
PMID:35632354
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9143786/
Abstract

Graphene, an atomically thin material, has unique electrical, mechanical, and optical properties that can enhance the performance of thin film-based flexible and transparent devices, including gas sensors. Graphene synthesized on a metallic catalyst must first be transferred onto a target substrate using wet or dry transfer processes; however, the graphene surface is susceptible to chemical modification and mechanical damage during the transfer. Defects on the graphene surface deteriorate its excellent intrinsic properties, thus reducing device performance. In this study, the surface properties of transferred graphene were investigated according to the transfer method (wet vs. dry) and characterized using atomic force microscopy, Raman spectroscopy, and contact angle measurements. After the wet transfer process, the surface properties of graphene exhibited tendencies similar to the poly(methyl methacrylate) residue remaining after solvent etching. The dry-transferred graphene revealed a surface closer to that of pristine graphene, regardless of substrates. These results provide insight into the utilization of wet and dry transfer processes for various graphene applications.

摘要

石墨烯是一种原子级厚度的材料,具有独特的电学、力学和光学性能,可提高包括气体传感器在内的基于薄膜的柔性和透明器件的性能。在金属催化剂上合成的石墨烯必须首先使用湿法或干法转移工艺转移到目标衬底上;然而,在转移过程中,石墨烯表面容易受到化学改性和机械损伤。石墨烯表面的缺陷会使其优异的固有性能恶化,从而降低器件性能。在本研究中,根据转移方法(湿法与干法)研究了转移后石墨烯的表面性能,并使用原子力显微镜、拉曼光谱和接触角测量进行了表征。湿法转移过程后,石墨烯的表面性能表现出与溶剂蚀刻后残留的聚甲基丙烯酸甲酯相似的趋势。无论衬底如何,干法转移的石墨烯都显示出更接近原始石墨烯的表面。这些结果为湿法和干法转移工艺在各种石墨烯应用中的利用提供了见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/a8980360804c/sensors-22-03944-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/a9f14b99736e/sensors-22-03944-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/159a5d166a13/sensors-22-03944-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/2cf52ff5acc9/sensors-22-03944-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/ef0b716478d7/sensors-22-03944-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/a8980360804c/sensors-22-03944-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/a9f14b99736e/sensors-22-03944-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/159a5d166a13/sensors-22-03944-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/2cf52ff5acc9/sensors-22-03944-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/ef0b716478d7/sensors-22-03944-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e462/9143786/a8980360804c/sensors-22-03944-g005.jpg

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