Bhatia Pia, Shin Trey T, Kavetsky Kyril, Sailors Benjamin N, Siokos George, Uy-Tioco Alexandra Sofia, Keneipp Rachael N, Gusdorff Jordan A, Bassett Lee C, Drndić Marija
Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, PA 19104, USA.
Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, PA 19104, USA; Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA 19104, USA.
Micron. 2025 Feb;189:103747. doi: 10.1016/j.micron.2024.103747. Epub 2024 Nov 14.
Two-dimensional (2D) materials have many applications ranging from heterostructure electronics to nanofluidics and quantum technology. In order to effectively utilize 2D materials towards these ends, they must be transferred and integrated into complex device geometries. In this report, we investigate two conventional methods for the transfer of 2D materials: viscoelastic stamping with polydimethylsiloxane (PDMS) and a heated transfer with poly bis-A carbonate (PC). We use both methods to transfer mechanically-exfoliated flakes of hexagonal boron nitride onto silicon nitride (SiN) substrates and characterize the resulting transfers using atomic force microscopy (AFM), aberration-corrected scanning transmission electron microscopy (AC-STEM) and electron energy loss spectroscopy (EELS). We find that both transfer methods yield flakes with significant and comparable residue (within the limitations of our study on eight samples). Qualitative interpretation of EELS maps demonstrates that this residue is comprised of silicon, carbon and oxygen for both transfer methods. Quantitative analysis of AC-STEM images reveals that the area covered in residue is on average, slightly lower for PDMS transfers (31 % ± 1 %), compared to PC transfers (41 % ± 4 %). This work underscores the importance of improving existing transfer protocols towards applications where cleaner materials are critical, as well as the need for robust methods to clean 2D materials.
二维(2D)材料有许多应用,涵盖从异质结构电子学到纳米流体学和量子技术等领域。为了有效地将二维材料用于这些目的,必须将它们转移并集成到复杂的器件几何结构中。在本报告中,我们研究了两种用于转移二维材料的传统方法:用聚二甲基硅氧烷(PDMS)进行粘弹性压印和用聚双酚A碳酸酯(PC)进行加热转移。我们使用这两种方法将机械剥离的六方氮化硼薄片转移到氮化硅(SiN)衬底上,并使用原子力显微镜(AFM)、像差校正扫描透射电子显微镜(AC-STEM)和电子能量损失谱(EELS)对所得转移结果进行表征。我们发现,两种转移方法得到的薄片都有显著且相当的残留(在我们对八个样品的研究范围内)。对EELS图谱的定性解释表明,两种转移方法的这种残留都由硅、碳和氧组成。对AC-STEM图像的定量分析表明,与PC转移(41%±4%)相比,PDMS转移的残留覆盖面积平均略低(31%±1%)。这项工作强调了改进现有转移方案对于更清洁材料至关重要的应用的重要性,以及对用于清洁二维材料的可靠方法的需求。