Dyck Ondrej, Swett Jacob L, Evangeli Charalambos, Lupini Andrew R, Mol Jan, Jesse Stephen
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Biodesign Institute, Arizona State University, Tempe, AZ 87287, USA.
Microsc Microanal. 2022 May 30:1-17. doi: 10.1017/S1431927622000824.
Over the last few years, a new mode for imaging in the scanning transmission electron microscope (STEM) has gained attention as it permits the direct visualization of sample conductivity and electrical connectivity. When the electron beam (e-beam) is focused on the sample in the STEM, secondary electrons (SEs) are generated. If the sample is conductive and electrically connected to an amplifier, the SE current can be measured as a function of the e-beam position. This scenario is similar to the better-known scanning electron microscopy-based technique, electron beam-induced current imaging, except that the signal in the STEM is generated by the emission of SEs, hence the name secondary electron e-beam-induced current (SEEBIC), and in this case, the current flows in the opposite direction. Here, we provide a brief review of recent work in this area, examine the various contrast generation mechanisms associated with SEEBIC, and illustrate its use for the characterization of graphene nanoribbon devices.
在过去几年中，扫描透射电子显微镜（STEM）中的一种新成像模式受到了关注，因为它能够直接观察样品的导电性和电连通性。当电子束（e束）聚焦在STEM中的样品上时，会产生二次电子（SEs）。如果样品是导电的并且与放大器电连接，则可以测量SE电流作为e束位置的函数。这种情况类似于更为人熟知的基于扫描电子显微镜的技术——电子束诱导电流成像，不同之处在于STEM中的信号是由SEs的发射产生的，因此称为二次电子束诱导电流（SEEBIC），在这种情况下，电流流动方向相反。在这里，我们简要回顾了该领域的近期工作，研究了与SEEBIC相关的各种对比度产生机制，并说明了其在表征石墨烯纳米带器件中的应用。
