You Chunyu, Li Xing, Hu Yuhang, Huang Ningge, Wang Yang, Wu Binmin, Jiang Guobang, Huang Jiayuan, Zhang Ziyu, Chen Bingxin, Wu Yue, Liu Junhan, Chen Xiangzhong, Song Enming, Cui Jizhai, Zhou Peng, Di Zengfeng, An Zhenghua, Huang Gaoshan, Mei Yongfeng
Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China.
Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People's Republic of China.
Proc Natl Acad Sci U S A. 2024 Aug 13;121(33):e2403950121. doi: 10.1073/pnas.2403950121. Epub 2024 Aug 8.
Miniaturized reconstructive spectrometers play a pivotal role in on-chip and portable devices, offering high-resolution spectral measurement through precalibrated spectral responses and AI-driven reconstruction. However, two key challenges persist for practical applications: artificial intervention in algorithm parameters and compatibility with complementary metal-oxide-semiconductor (CMOS) manufacturing. We present a cutting-edge miniaturized reconstructive spectrometer that incorporates a self-adaptive algorithm referenced with Fabry-Perot resonators, delivering precise spectral tests across the visible range. The spectrometers are fabricated with CMOS technology at the wafer scale, achieving a resolution of ~2.5 nm, an average wavelength deviation of ~0.27 nm, and a resolution-to-bandwidth ratio of ~0.46%. Our approach provides a path toward versatile and robust reconstructive miniaturized spectrometers and facilitates their commercialization.
小型化重构光谱仪在片上和便携式设备中发挥着关键作用，通过预校准的光谱响应和人工智能驱动的重构实现高分辨率光谱测量。然而，实际应用中仍存在两个关键挑战：算法参数的人工干预以及与互补金属氧化物半导体（CMOS）制造的兼容性。我们展示了一种前沿的小型化重构光谱仪，它结合了以法布里 - 珀罗谐振器为参考的自适应算法，可在可见光范围内进行精确的光谱测试。这些光谱仪采用CMOS技术在晶圆级制造，分辨率达到约2.5纳米，平均波长偏差约为0.27纳米，分辨率与带宽之比约为0.46%。我们的方法为通用且稳健的重构小型化光谱仪提供了一条途径，并促进了它们的商业化。
