Ren Wenran, Cui Jiwen, Tan Jiubin
Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.
Rev Sci Instrum. 2022 May 1;93(5):055102. doi: 10.1063/5.0089964.
A laser autocollimator based on transmission grating and combined reflector is proposed to simultaneously measure a three-dimensional angle. The optical configuration of the proposed autocollimator is designed, and a mathematical model for measuring a three-dimensional angle is established. The three-dimensional angle is obtained by detecting the change in the direction of the three measurement beams generated by grating diffraction and reflected by a combined reflector. The experimental setup based on the proposed autocollimator was constructed, and a series of experiments were performed to verify the feasibility of the proposed autocollimator for precision angle measurement. The experimental results showed that the measurement resolution of three-dimensional angles is better than 0.01", with measurement repeatability of yaw, pitch, and roll angles being 0.013", 0.012", and 0.009", respectively.
提出了一种基于透射光栅和组合反射镜的激光自准直仪，用于同时测量三维角度。设计了所提出的自准直仪的光学结构，并建立了测量三维角度的数学模型。通过检测由光栅衍射产生并由组合反射镜反射的三束测量光束方向的变化来获得三维角度。构建了基于所提出的自准直仪的实验装置，并进行了一系列实验，以验证所提出的自准直仪用于精密角度测量的可行性。实验结果表明，三维角度的测量分辨率优于0.01"，偏航角、俯仰角和滚动角的测量重复性分别为0.013"、0.012"和0.009"。
