School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
Sensors (Basel). 2023 Jan 17;23(3):1091. doi: 10.3390/s23031091.
Here, we report an ultracompact angular displacement sensor based on the Talbot effect of optical microgratings. Periodic Talbot interference patterns were obtained behind an upper optical grating. By putting another grating within the Talbot region, the total transmission of the two-grating structure was found to be approximatively in a linear relationship with the relative pitch angle between the two gratings, which was explained by a transversal shift of the Talbot interference patterns. The influence of the grating parameters (e.g., the grating period, the number of grating lines and the gap between the two gratings) was also studied in both a simulation and an experiment, showing a tunable sensitivity and range by simply changing the grating parameters. A sensitivity of 0.19 mV/arcsec was experimentally obtained, leading to a relative sensitivity of 0.27%/arcsec within a linear range of ±396 arcsec with the 2 μm-period optical gratings. Benefitting from tunable properties and an ultracompact structure, we believe that the proposed sensor shows great potential in applications such as aviation, navigation, robotics and manufacturing engineering.
在这里，我们报道了一种基于光学微光栅泰伯效应的超紧凑角位移传感器。在上光学光栅后面获得了周期性的泰伯干涉图案。通过在泰伯区域内放置另一个光栅，发现两光栅之间的相对节距角与两光栅结构的总透射率近似呈线性关系，这可以通过泰伯干涉图案的横向位移来解释。还通过模拟和实验研究了光栅参数（例如光栅周期、光栅线数量和两个光栅之间的间隙）的影响，通过简单地改变光栅参数可以实现可调谐的灵敏度和范围。实验获得了 0.19 mV/arcsec 的灵敏度，在具有 2 μm 周期的光学光栅的±396 arcsec 的线性范围内，相对灵敏度为 0.27%/arcsec。得益于可调谐特性和超紧凑结构，我们相信所提出的传感器在航空、导航、机器人和制造工程等应用中具有很大的潜力。
